Basic information Safety Supplier Related
ChemicalBook >  Product Catalog >  Organic Chemistry >  Amides >  Acyclic polyamines and their derivatives >  TRIS(DIMETHYLAMINO)SILANE

TRIS(DIMETHYLAMINO)SILANE

Basic information Safety Supplier Related

TRIS(DIMETHYLAMINO)SILANE Basic information

Product Name:
TRIS(DIMETHYLAMINO)SILANE
Synonyms:
  • TRIS(DIMETHYLAMINO)SILANE
  • n,n,n’,n’,n’’,n’’-hexamethyl-silanetriamin
  • n,n,n’,n’,n’’,n’’-hexamethylsilanetriamine
  • N,N,N’,N’,N’’,N’’-hexamethyl-Silanetriamine
  • TRIS(DIMETHYLAMINO)SILANE 99+%
  • N,N',N''-(Silanetriyl)tris(dimethylamine)
  • N,N',N''-Silanetriyltris(dimethylamine)
  • TRIS(DIMETHYLAMINO)SILANE, 99.9+%
CAS:
15112-89-7
MF:
C6H19N3Si
MW:
161.32
EINECS:
239-165-0
Product Categories:
  • ALD Precursors
  • organosilicon compounds
Mol File:
15112-89-7.mol
More
Less

TRIS(DIMETHYLAMINO)SILANE Chemical Properties

Melting point:
<0°C
Boiling point:
145 °C
Density 
0,838 g/cm3
refractive index 
1.4247
Flash point:
25°C
pka
10.93±0.70(Predicted)
form 
liquid
color 
colorless to light yellow
Specific Gravity
0.84
Sensitive 
air sensitive, moisture sensitive
Hydrolytic Sensitivity
8: reacts rapidly with moisture, water, protic solvents
EPA Substance Registry System
N,N,N',N',N'',N''-Hexamethylsilanetriamine (15112-89-7)
More
Less

Safety Information

Hazard Codes 
F,C
Risk Statements 
10-36/37/38-52/53-34-29-20-15-11
Safety Statements 
16-26-36/37/39-45-43
RIDADR 
1993
WGK Germany 
3
RTECS 
VV5800000
TSCA 
Yes
Toxicity
rabbit,LD50,skin,477mg/kg (477mg/kg),LIVER: OTHER CHANGESLUNGS, THORAX, OR RESPIRATION: CHRONIC PULMONARY EDEMA,Toxicology and Industrial Health. Vol. 5, Pg. 45, 1989.
More
Less

TRIS(DIMETHYLAMINO)SILANE Usage And Synthesis

Uses

Tris(dimethylamino)silane (TDMAS) is used as an organosilicon source for the deposition of Si oxynitride; carbonitride; nitride and oxide thin films. It is also used to form multicomponent silicon containing thin films. The depositions can be carried out at low substrate temperatures (<150). The melting point and vapor pressure of TDMAS is in a suitable working range; thus making it a very good vapor deposition precursor.

General Description

Please inquire for quantity, pricing, and packaging options.

TRIS(DIMETHYLAMINO)SILANESupplier

Baoji Funuokang Industrial Co., Ltd Gold
Tel
13220096790
Email
1754423088@qq.com
Shanghai Boyle Chemical Co., Ltd.
Tel
021-50182298 021-50180596
Email
sales@boylechem.com
J & K SCIENTIFIC LTD.
Tel
010-82848833 400-666-7788
Email
jkinfo@jkchemical.com
Meryer (Shanghai) Chemical Technology Co., Ltd.
Tel
021-61259108 18621169109
Email
market03@meryer.com
INTATRADE GmbH
Tel
+49 3493/605464
Email
sales@intatrade.de