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TETRAKIS(DIMETHYLAMINO)TITANIUM

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TETRAKIS(DIMETHYLAMINO)TITANIUM Basic information

Product Name:
TETRAKIS(DIMETHYLAMINO)TITANIUM
Synonyms:
  • Tetrakis(dimethylamino)titanium(IV), 99% TDMAT, 93-2240, contained in 50 ml Swagelok cylinder for CVD/ALD
  • Tetrakis(dimethylamino)titanium, (trace metal basis), 99.99%
  • Tetrakis(dimethylamino)titanium(IV), 99% TDMAT
  • Tetrakis(diMethylaMino)titaniuM, 99.99%, (trace Metal basis)
  • Tetrakis(diMethylaMino)titaniuM, 99.99% 25GR
  • Tetrakis(DiMethylaMino)TitaniuM (Metals Basis)
  • Tetrakis(diMethylaMino)titaniuM, 99.99% Metals basis
  • Tetrakis(diMethylaMido)titaniuM(IV) 99.999% trace Metals basis
CAS:
3275-24-9
MF:
C2H7NTi
MW:
92.95
EINECS:
221-904-3
Product Categories:
  • metal amide complex
  • ALD Precursors
  • Classes of Metal Compounds
  • Ti (Titanium) Compounds
  • Transition Metal Compounds
Mol File:
3275-24-9.mol
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TETRAKIS(DIMETHYLAMINO)TITANIUM Chemical Properties

Melting point:
<4°C
Boiling point:
50 °C0.5 mm Hg(lit.)
Density 
0.947 g/mL at 25 °C(lit.)
refractive index 
1.55
Flash point:
-22 °F
storage temp. 
Flammables area
form 
liquid
Specific Gravity
0.96
color 
yellow to orange
Hydrolytic Sensitivity
8: reacts rapidly with moisture, water, protic solvents
Sensitive 
Moisture Sensitive
InChIKey
MNWRORMXBIWXCI-UHFFFAOYSA-N
CAS DataBase Reference
3275-24-9(CAS DataBase Reference)
NIST Chemistry Reference
Tetrakis(dimethylamino)titanium(3275-24-9)
EPA Substance Registry System
Methanamine, N-methyl-, titanium(4+) salt (3275-24-9)
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Safety Information

Hazard Codes 
F,C,Xi
Risk Statements 
11-14-34
Safety Statements 
16-26-36/37/39-43-45
RIDADR 
UN 3398 4.3/PG 1
WGK Germany 
3
TSCA 
Yes
HazardClass 
4.3
PackingGroup 
II
HS Code 
29319090

MSDS

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TETRAKIS(DIMETHYLAMINO)TITANIUM Usage And Synthesis

Chemical Properties

clear yellow to orange liquid

Uses

Precursors Packaged for Depositions Systems

Uses

Tetrakis(dimethylamido)titanium(IV) (TDMAT) is a precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD)and titanium dioxide thin films by atomic layer deposition (ALD).TDMAT undergoes exothermal reaction with excess cyclopentadiene to yield tris(dimethylamido)(η5-cyclopentadienyl)titanium(IV).

General Description

Atomic number of base material: 22 Titanium

TETRAKIS(DIMETHYLAMINO)TITANIUMSupplier

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