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TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM

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TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM Basic information

Product Name:
TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM
Synonyms:
  • TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM
  • ZIRCONIUM TETRAKIS(ETHYLMETHYLAMIDE)
  • Tetrakis(ethyl Methyl amido) zirconium
  • tetrakis(ethylmethylamido)zirconium(iv)
  • tetrakis(ethylmethylamino)zirconium(iv)
  • Tetrakis(ethylmethylamino)zirconium(IV) 99%, 40-1710, contained in 50 ml Swagelok cylinder for CVD/ALD
  • Tetrakis(ethylmethylamido)zirconium(IV), 99% TEMAZ, 40-1710, contained in 50 ml Swagelok cylinder for CVD/ALD
  • Tetrakis(ethylmethylamino)zirconium 99.999%
CAS:
175923-04-3
MF:
C12H32N4Zr
MW:
323.63
Product Categories:
  • ALD Precursors
  • metal amide complex
Mol File:
175923-04-3.mol
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TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM Chemical Properties

Boiling point:
81 °C0.1 mm Hg(lit.)
Density 
1.049 g/mL at 25 °C(lit.)
Flash point:
50 °F
form 
liquid
Specific Gravity
1.049
color 
light yellow
Sensitive 
Air & Moisture Sensitive
Hydrolytic Sensitivity
8: reacts rapidly with moisture, water, protic solvents
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Safety Information

Hazard Codes 
F,Xi
Risk Statements 
11-14-36/37/38-14/15
Safety Statements 
16-26-36
RIDADR 
UN 3398 4.3/PG 2
WGK Germany 
3
TSCA 
No
HazardClass 
4.3
PackingGroup 
II

MSDS

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TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM Usage And Synthesis

Uses

Precursors Packaged for Depositions Systems

General Description

Atomic number of base material: 40 Zirconium

TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUMSupplier

Shanghai Oriphant Chemical Co.,Ltd Gold
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Fujian Wolfa Biotechnology Co., Ltd Gold
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