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TETRAKIS(TRIMETHYLSILOXY)SILANE

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TETRAKIS(TRIMETHYLSILOXY)SILANE Basic information

Product Name:
TETRAKIS(TRIMETHYLSILOXY)SILANE
Synonyms:
  • 1,1,1,5,5,5-hexamethyl-3,3-bis-(trimethylsilanyloxy)-trisiloxane
  • 1,1,1,5,5,5-hexamethyl-3,3-bis(trimethylsiloxy)-Trisiloxane
  • 1,1,1,5,5,5-hexamethyl-3,3-bis[(trimethylsilyl)oxy]-trisiloxan
  • 1,1,1,5,5,5-hexamethyl-3,3-bis[(trimethylsilyl)oxy]-Trisiloxane
  • 1,1,1,5,5,5-hexamethyl-3,3-bis-trimethylsilanyloxy-trisiloxane
  • 1,1,5,5,5-hexamethyl-3,3-bis[(trimethylsilyl)oxy]trisiloxane
  • Tetrakis-(trimethylsilyloxy)-silan
  • Trisiloxane,1,1,1,5,5,5-hexamethyl-3,3-bis[(trimethylsilyl)oxy]-
CAS:
3555-47-3
MF:
C12H36O4Si5
MW:
384.84
EINECS:
222-613-4
Product Categories:
  • Organics
  • OthersOrganometallic Reagents
  • Organometallic Reagents
  • Organosilicon
  • Trialkoxysilanes
Mol File:
3555-47-3.mol
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TETRAKIS(TRIMETHYLSILOXY)SILANE Chemical Properties

Melting point:
-60 °C
Boiling point:
103-106 °C/2 mmHg (lit.)
Density 
0.87 g/mL at 25 °C (lit.)
vapor pressure 
27.4hPa at 20℃
refractive index 
n20/D 1.389(lit.)
Flash point:
169 °F
storage temp. 
Inert atmosphere,Room Temperature
form 
liquid
Specific Gravity
0.868
color 
Colorless to Almost colorless
Water Solubility 
150.7ng/L at 23℃
Hydrolytic Sensitivity
4: no reaction with water under neutral conditions
BRN 
1793898
LogP
9 at 25℃
EPA Substance Registry System
Tetrakis(trimethylsiloxy)silane (3555-47-3)
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Safety Information

Hazard Codes 
Xi
Risk Statements 
36/37/38
Safety Statements 
26-36
WGK Germany 
3
TSCA 
Yes
HS Code 
29319090

MSDS

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TETRAKIS(TRIMETHYLSILOXY)SILANE Usage And Synthesis

Chemical Properties

Colorless liquid

Uses

Tetrakis(trimethylsilyloxy)silane (TTMS) is an organosilicon compound used as a precursor to prepare nanostructured organosilicon polymer films by plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure. TTMS along with cyclohexane can also be used to synthesize low dielectric constant SiCOH films by PECVD method.

Flammability and Explosibility

Not classified

TETRAKIS(TRIMETHYLSILOXY)SILANESupplier

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