HAFNIUM TERT-BUTOXIDE Chemical Properties

Melting point:

2℃

Boiling point:

90 °C5 mm Hg(lit.)

Density 

1.166 g/mL at 25 °C(lit.)

refractive index 

n20/D 1.424(lit.)

Flash point:

83 °F

solubility 

Soluble in hydrocarbons, reacts with alcohols, ketones, and esters

form 

Liquid

Specific Gravity

1.166

Hydrolytic Sensitivity

7: reacts slowly with moisture/water

Sensitive 

Moisture Sensitive/Light Sensitive

Exposure limits

ACGIH: TWA 0.5 mg/m3
NIOSH: IDLH 50 mg/m3; TWA 0.5 mg/m3

CAS DataBase Reference

2172-02-3(CAS DataBase Reference)

Safety Information

Hazard Codes 

Xi

Risk Statements 

10-36/37/38

Safety Statements 

16-26

RIDADR 

UN 1993 3/PG 3

WGK Germany 

3

TSCA 

No

HazardClass 

3

PackingGroup 

II

HS Code 

2905190019

MSDS

• Language:English Provider:SigmaAldrich
• Language:English Provider:ALFA

HAFNIUM TERT-BUTOXIDE Usage And Synthesis

Uses

Hafnium tert-butoxide [Hf(OtBu)₄] is a mononuclear; volatile; and highly promising precursor for the deposition of HfO₂ and other hafnium doped thin films by vapor deposition techniques. The deposited films show high dielectric constant suitable for semiconductor devices.

General Description

Atomic number of base material: 72 Hafnium

HAFNIUM TERT-BUTOXIDE(2172-02-3)Related Product Information

• Hafnium(Ⅳ) oxide
• Hafnium oxide
• tert-Butanol
• 2-Butanol
• HAFNIUM (IV) I-PROPOXIDE MONOISOPROPYLATE
• HAFNIUM ETHOXIDE
• TETRAKIS(1-METHOXY-2-METHYL-2-PROPOXY)HAFNIUM
• HAFNIUM
• HAFNIUM TERT-BUTOXIDE
• HAFNIUM HYDRIDE