ChemicalBook > Product Catalog > Organic Chemistry > Organometallic compounds > Organozirconium > TETRAKIS(DIETHYLAMINO)ZIRCONIUM
TETRAKIS(DIETHYLAMINO)ZIRCONIUM
TETRAKIS(DIETHYLAMINO)ZIRCONIUM Basic information
- Product Name:
- TETRAKIS(DIETHYLAMINO)ZIRCONIUM
- Synonyms:
-
- Tetrakis(diethylaMino)zirconiuM(IV), 99%
- Zirconium, tetrakis(diethylamino)-
- TETRAKIS(DIETHYLAMIDO)ZIRCONIUM(IV), ELECTRONIC GRADE, 99.99+%
- Tetrakis(diethylamino)zirkonium
- Tetrakis(diethylamino)zirconium,99%
- tetrakis(diethylamido)zirconium(iv)
- TETRAKIS(DIETHYLAMINO)ZIRCONIUM
- ZIRCONIUM DIETHYLAMIDE
- CAS:
- 13801-49-5
- MF:
- C4H11NZr
- MW:
- 164.36
- Product Categories:
-
- Precursors by Metal
- metal amide complex
- Vapor Deposition Precursors
- Zirconium
- Mol File:
- 13801-49-5.mol
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TETRAKIS(DIETHYLAMINO)ZIRCONIUM Chemical Properties
- Boiling point:
- 128 °C/0.05 mmHg (lit.)
- Density
- 1.026 g/mL at 25 °C (lit.)
- refractive index
- n20/D 1.51(lit.)
- Flash point:
- 54 °F
- storage temp.
- 2-8°C
- form
- liquid
- color
- yellow
- Sensitive
- Moisture Sensitive
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Safety Information
- Hazard Codes
- F,Xi
- Risk Statements
- 11-14-36/37/38
- Safety Statements
- 16-26-36
- RIDADR
- UN 3398 4.3/PG 2
- WGK Germany
- 3
- HazardClass
- 4.3
- PackingGroup
- II
MSDS
- Language:English Provider:ACROS
- Language:English Provider:SigmaAldrich
- Language:English Provider:ALFA
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TETRAKIS(DIETHYLAMINO)ZIRCONIUM Usage And Synthesis
Description
Tetrakis (diethylamino) zirconium is a useful precusor compound in the deposition of thin film ferroelectric materials by CVD. It is also useful in the production of olefin polymers1,2. As a precusor, it is also useful in the deposition of ZrN films using remote plasma-enhanced atomic layer deposition method3.
Reference
- Greenwald, Anton C. "CVD thin film compounds." US, US5104690. 1992.
- Murray, Rex Eugene. "Catalyst for the production of olefin polymers." US, US 6320005 B1. 2001.
- Cho, Seungchan, et al. "Barrier Characteristics of ZrN Films Deposited by Remote Plasma-Enhanced Atomic Layer Deposition Using Tetrakis (diethylamino) zirconium Precursor." Japanese Journal of Applied Physics 46. 7A (2007):4085-4088.
Uses
Tetrakis(diethylamino)zirconium is used in the preparation of ZrN and ZrO2 films as well as zirconium complexes to act as catalytic precursors for organic chemical reactions.
General Description
Atomic number of base material: 40 Zirconium
TETRAKIS(DIETHYLAMINO)ZIRCONIUMSupplier
J & K SCIENTIFIC LTD.
- Tel
- 010-82848833 400-666-7788
- jkinfo@jkchemical.com
Meryer (Shanghai) Chemical Technology Co., Ltd.
- Tel
- 4006608290; 18621169109
- market03@meryer.com
INTATRADE GmbH
- Tel
- +49 3493/605464
- sales@intatrade.de
Shandong Xiya Chemical Co., Ltd
- Tel
- 13355009207 13355009207
- 3007715519@qq.com
Sigma-Aldrich
- Tel
- 021-61415566 800-8193336
- orderCN@merckgroup.com
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- TETRAKIS(DIMETHYLAMINO)ZIRCONIUM