TITANIUM SILICIDE Chemical Properties

Melting point:

2130°C

Density 

4.3 g/cm3

form 

-325 Mesh Powder

Resistivity

55 (ρ/μΩ.cm)

Water Solubility 

Soluble in hydrofluoric acid. Insoluble in water.

Crystal Structure

Hexagonal

EPA Substance Registry System

Titanium silicide (Ti5Si3) (12067-57-1)

Safety Information

RIDADR 

UN3178

TSCA 

Yes

HazardClass 

4.1

PackingGroup 

III

MSDS

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TITANIUM SILICIDE Usage And Synthesis

Chemical Properties

-325 mesh gray powder(s) [AES93]

Uses

It is used as source, gate and drain contacts and local interconnections in CMOS integrated circuits. it is used in the C54 phase.

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