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ChemicalBook >  Product Catalog >  Organic Chemistry >  Organometallic compounds >  Organic scandium, tantalum, tungsten >  TANTALUM ETHOXIDE

TANTALUM ETHOXIDE

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TANTALUM ETHOXIDE Basic information

Product Name:
TANTALUM ETHOXIDE
Synonyms:
  • ethanol,tantalum(5+)salt
  • TANTAL(V)-ETHOXID
  • TANTALUM PENTAETHOXIDE
  • TANTALUM(V) ETHOXIDE
  • TANTALUM ETHOXIDE
  • TANTALUM ETHYLATE
  • Tantalum(V) ethoxide, 99.98% metals basis
  • TANTALUM (V) ETHOXIDE (99.99+%-TA) SPECTRO
CAS:
6074-84-6
MF:
C10H25O5Ta
MW:
406.25
EINECS:
228-010-2
Product Categories:
  • metal alkoxide
  • Catalysis and Inorganic Chemistry
  • Chemical Synthesis
  • Solution Deposition Precursors
  • Tantalum
  • TantalumMicro/Nanoelectronics
  • 73: Tantalum
  • CVD and ALD Precursors by Metal
  • CVD and ALD Precursors Packaged for Deposition Systems
  • Micro &amp
  • Nanoelectronics
  • Vapor Deposition Precursors
  • Materials Science
  • Micro/NanoElectronics
  • New Products for Materials Research and Engineering
  • bc0001
Mol File:
6074-84-6.mol
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TANTALUM ETHOXIDE Chemical Properties

Melting point:
21 °C(lit.)
Boiling point:
155 °C0.01 mm Hg(lit.)
Density 
1.566 g/mL at 25 °C(lit.)
refractive index 
n20/D 1.487(lit.)
Flash point:
87 °F
storage temp. 
2-8°C
solubility 
Soluble in organic solvents.
form 
liquid
Specific Gravity
1.56
Water Solubility 
Decomposes in water. Soluble in organic solvents.
Sensitive 
Moisture Sensitive/Air Sensitive
Hydrolytic Sensitivity
8: reacts rapidly with moisture, water, protic solvents
BRN 
3678999
CAS DataBase Reference
6074-84-6(CAS DataBase Reference)
EPA Substance Registry System
Ethanol, tantalum(5+) salt (6074-84-6)
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Safety Information

Hazard Codes 
C,F
Risk Statements 
10-34
Safety Statements 
16-26-36/37/39-45
RIDADR 
UN 2920 8/PG 2
WGK Germany 
3
3-8-10-21
TSCA 
No
HazardClass 
3
PackingGroup 
III
HS Code 
2905190019

MSDS

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TANTALUM ETHOXIDE Usage And Synthesis

Description

Tantalum ethoxide can be used for the manufacture of tantalum (V) oxidethin-film materials using chemical vapor deposition, atomic layer deposition, and sol-gel processing. Those materials have applications in semiconductor, electrochromic and optical fields1,2,3. In research filed, it can be used for the synthesis of some novel compounds such as oxo-alkoxide-carboxylates like Ta4O4(OEt)8(OOCCH3)4 with special molecular structure2. It is also used to prepare tantalum oxide nanoparticles for the imaging cartilage4.

Reference

  1. Sukanya Murali, †, A. Anand Deshpande, and C. G. Takoudis. "Modeling of the Metalorganic Chemical Vapor Deposition of Tantalum Oxide from Tantalum Ethoxide and Oxygen." Industrial & Engineering Chemistry Research 44.16(2005): págs. 6387-6392.
  2. Dong, L. U., et al. "Synthesis Method and Application of Tantalum (Ⅴ) Ethoxide" Guangzhou Chemical Industry (2016).
  3. https://www.alfa.com/en/catalog/014643/

Chemical Properties

clear colorless to almost colorless liquid or

Uses

Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods

Uses

Tantalum(V) ethoxide acts as a precursor used in the preparation of ultra thin films of tantalum oxide and other tantalum containing films, which finds application in semiconductors. It is also used to prepare tantalum oxide nanoparticles for the imaging cartilage.

General Description

Tantalum(V) ethoxide Ta(OC2H5)5 is a tantalum alkoxide that can be used as a precursor in the preparation of tantalum oxide by chemical vapor deposition (CVD). It has excellent volatility and thermal stability. It can be synthesized by anodic oxidation of tantalum plate in anhydrous ethanol.

Purification Methods

Purify it by distillation under reduced pressure. It aggregates in *C6H6,EtOH, MeCN, pyridine and diisopropyl ether. [Bradley et al. J Chem Soc 726 1955, Bradley et al. J Chem Soc 5 1956, Beilstein 1 IV 1312.]

TANTALUM ETHOXIDESupplier

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