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TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM

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TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM Basic information

Product Name:
TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM
Synonyms:
  • HAFNIUM TETRAKIS(ETHYLMETHYLAMIDE), 99+%
  • Tetrakis(ethylmethylamino)hafnium 99.999%
  • Tetrakis(ethylMethylaMino)hafniuM, 99% (99.99+%-Hf, <0.15% Zr) PURATREM, 72-7720, contained in 50 Ml Swagelok cylinder (96-1070) for CVD/ALD
  • Tetrakis(ethylMethylaMido)hafniuM(IV) >=99.99% trace Metals basis
  • Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH
  • Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH PURATREM
  • Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH, PURATREM, 72-7720, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD
  • TEMAH: Hf[N(CH3)(CH2CH3)]4
CAS:
352535-01-4
MF:
C12H32HfN4
MW:
410.9
Product Categories:
  • ALD Precursors
  • metal amide complex
Mol File:
352535-01-4.mol
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TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM Chemical Properties

Melting point:
<-50 °C
Boiling point:
79 °C0.1 mm Hg(lit.)
Density 
1.324 g/mL at 25 °C(lit.)
Flash point:
52 °F
storage temp. 
2-8°C
form 
liquid
color 
colorless to yellow
Specific Gravity
1.324
Hydrolytic Sensitivity
9: reacts extremely rapidly with atmospheric moisture - may be pyrophoric - glove box or sealed system required
Sensitive 
Air & Moisture Sensitive
EPA Substance Registry System
Ethanamine, N-methyl-, hafnium(4+) salt (4:1) (352535-01-4)
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Safety Information

Hazard Codes 
F,Xi
Risk Statements 
11-14-36/37/38
Safety Statements 
16-26-36
RIDADR 
UN 3398 4.3/PG 2
WGK Germany 
3
TSCA 
No
HazardClass 
4.3
PackingGroup 
II
HS Code 
2921199990

MSDS

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TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM Usage And Synthesis

Uses

Precursors Packaged for Depositions Systems

General Description

Atomic number of base material: 72 Hafnium

TETRAKIS(ETHYLMETHYLAMINO)HAFNIUMSupplier

Fujian Wolfa Biotechnology Co., Ltd Gold
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Domole Scientific Gold
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J & K SCIENTIFIC LTD.
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