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TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM
TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM Basic information
- Product Name:
- TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM
- Synonyms:
-
- HAFNIUM TETRAKIS(ETHYLMETHYLAMIDE), 99+%
- Tetrakis(ethylmethylamino)hafnium 99.999%
- Tetrakis(ethylMethylaMino)hafniuM, 99% (99.99+%-Hf, <0.15% Zr) PURATREM, 72-7720, contained in 50 Ml Swagelok cylinder (96-1070) for CVD/ALD
- Tetrakis(ethylMethylaMido)hafniuM(IV) >=99.99% trace Metals basis
- Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH
- Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH PURATREM
- Tetrakis(ethylmethylamino)hafnium, 99% (99.99+%-Hf, <0.15% Zr) TEMAH, PURATREM, 72-7720, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD
- TEMAH: Hf[N(CH3)(CH2CH3)]4
- CAS:
- 352535-01-4
- MF:
- C12H32HfN4
- MW:
- 410.9
- Product Categories:
-
- ALD Precursors
- metal amide complex
- Mol File:
- 352535-01-4.mol
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TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM Chemical Properties
- Melting point:
- <-50 °C
- Boiling point:
- 79 °C0.1 mm Hg(lit.)
- Density
- 1.324 g/mL at 25 °C(lit.)
- Flash point:
- 52 °F
- storage temp.
- 2-8°C
- form
- liquid
- color
- colorless to yellow
- Specific Gravity
- 1.324
- Hydrolytic Sensitivity
- 9: reacts extremely rapidly with atmospheric moisture - may be pyrophoric - glove box or sealed system required
- Sensitive
- Air & Moisture Sensitive
- EPA Substance Registry System
- Ethanamine, N-methyl-, hafnium(4+) salt (4:1) (352535-01-4)
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Safety Information
- Hazard Codes
- F,Xi
- Risk Statements
- 11-14-36/37/38
- Safety Statements
- 16-26-36
- RIDADR
- UN 3398 4.3/PG 2
- WGK Germany
- 3
- TSCA
- No
- HazardClass
- 4.3
- PackingGroup
- II
- HS Code
- 2921199990
MSDS
- Language:English Provider:SigmaAldrich
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TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM Usage And Synthesis
Uses
Precursors Packaged for Depositions Systems
General Description
Atomic number of base material: 72 Hafnium
TETRAKIS(ETHYLMETHYLAMINO)HAFNIUMSupplier
J & K SCIENTIFIC LTD.
- Tel
- 010-82848833 400-666-7788
- jkinfo@jkchemical.com
Meryer (Shanghai) Chemical Technology Co., Ltd.
- Tel
- 4006608290; 18621169109
- market03@meryer.com
BeiJing Hwrk Chemicals Limted
- Tel
- 0757-86329057 18501085097
- sales3.gd@hwrkchemical.com
Energy Chemical
- Tel
- 021-021-58432009 400-005-6266
- sales8178@energy-chemical.com
Shanghai Boc Chemical Co.,Ltd
- Tel
- 021-34975603-808 18721111801
- sales@bocpharma.com
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