TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE Property

Boiling point:

90°C/0.1mm

Density 

1.252 g/mL at 25 °C (lit.)

Flash point:

115 °F

form 

liquid

color 

colorless to pale yellow

Specific Gravity

1.252

Water Solubility 

Reacts with water.

Sensitive 

Air Sensitive

Hydrolytic Sensitivity

8: reacts rapidly with moisture, water, protic solvents

CAS DataBase Reference

169896-41-7

EPA Substance Registry System

Tantalum, tris(N-ethylethanaminato)[2-methyl-2-propanaminato(2-)]-, (T-4)- (169896-41-7)

Safety

Hazard Codes 

C

Risk Statements 

10-14/15-34

Safety Statements 

26-36/37/39-43-45

RIDADR 

UN 3398 4.3/PG 2

WGK Germany 

3

TSCA 

No

HazardClass 

4.3

PackingGroup 

II

Hazard and Precautionary Statements (GHS)

Symbol(GHS)

Signal word

Danger

Hazard statements

H226Flammable liquid and vapour

H261In contact with water releases flammable gas

H314Causes severe skin burns and eye damage

H318Causes serious eye damage

Precautionary statements

P223Keep away from any possible contact with water, because of violent reaction and possible flash fire.

P231+P232Handle under inert gas. Protect from moisture.

P280Wear protective gloves/protective clothing/eye protection/face protection.

P303+P361+P353IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower.

P305+P351+P338IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing.

P310Immediately call a POISON CENTER or doctor/physician.

P405Store locked up.

P422Store contents under …

TANTALUM TRIS(DIETHYLAMIDO)-TERT-BUTYLIMIDE Chemical Properties,Usage,Production

Uses

Tantalum tris(diethylamido)-tert-butylimide is used as a precursor for tantalum nitride.

Uses

Tantalum tris(diethylamido)-tert-butylimide is a useful precursor for the atomic layer deposition of tantalum oxide and tantalum nitride.

General Description

Atomic number of base material: 73 Tantalum