TITANIUM SILICIDE Property

Melting point:

2130°C

Density 

4.3 g/cm3

form 

-325 Mesh Powder

Resistivity

55 (ρ/μΩ.cm)

Water Solubility 

Soluble in hydrofluoric acid. Insoluble in water.

Crystal Structure

Hexagonal

EPA Substance Registry System

Titanium silicide (Ti5Si3) (12067-57-1)

Safety

RIDADR 

UN3178

TSCA 

Yes

HazardClass 

4.1

PackingGroup 

III

Hazard and Precautionary Statements (GHS)

Symbol(GHS)

Hazard statements

H228Flammable solid

H315Causes skin irritation

H319Causes serious eye irritation

H335May cause respiratory irritation

Precautionary statements

P210Keep away from heat/sparks/open flames/hot surfaces. — No smoking.

P261Avoid breathing dust/fume/gas/mist/vapours/spray.

P280Wear protective gloves/protective clothing/eye protection/face protection.

P305+P351+P338IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing.

P405Store locked up.

TITANIUM SILICIDE Chemical Properties,Usage,Production

Chemical Properties

-325 mesh gray powder(s) [AES93]

Uses

It is used as source, gate and drain contacts and local interconnections in CMOS integrated circuits. it is used in the C54 phase.