DI(T-BUTYLAMINO)SILANE Chemical Properties

Boiling point:

167°C

Density 

0,816 g/cm³

refractive index 

1.4236

Flash point:

30°C

pka

11.91±0.70(Predicted)

form 

liquid

color 

colorless

Specific Gravity

0.816

Hydrolytic Sensitivity

8: reacts rapidly with moisture, water, protic solvents

Sensitive 

moisture sensitive, store cold

EPA Substance Registry System

Silanediamine, N,N'-bis(1,1-dimethylethyl)- (186598-40-3)

Safety Information

TSCA 

No

DI(T-BUTYLAMINO)SILANE Usage And Synthesis

Uses

Bis(t-butylamino)silane is a useful reagent, catalyst, and precursor. It is applicated in thin film deposition. Aminosilanes are the best choice as Si source for the deposition of hafnium silicates (HfSiO) and hafnium silicon oxynitrides (HfSiON).

DI(T-BUTYLAMINO)SILANE(186598-40-3)Related Product Information

• DI(T-BUTYLAMINO)SILANE
• 1,3-DI-TERT-BUTYL-2-(TERT-BUTYLAMINO)-1,3-DIAZA-2,4-DISILACYCLOTETRANE
• N,N',N''-TRI-TERT-BUTYLSILANETRIAMINE