TETRAKIS(ETHYLMETHYLAMINO)TITANIUM Property

Boiling point:

80 °C/0.1 mmHg (lit.)

Density 

0.923 g/mL at 25 °C (lit.)

Flash point:

36 °F

storage temp. 

2-8°C

form 

liquid

Specific Gravity

0.923

color 

yellow to orange

Hydrolytic Sensitivity

8: reacts rapidly with moisture, water, protic solvents

Sensitive 

moisture sensitive

Safety

Hazard Codes 

F,C

Risk Statements 

11-14-34

Safety Statements 

16-26-36/37/39-43-45

RIDADR 

UN 3398 4.3/PG 1

WGK Germany 

3

TSCA 

No

Hazard and Precautionary Statements (GHS)

Symbol(GHS)

Signal word

Danger

Hazard statements

H225Highly Flammable liquid and vapour

H260In contact with water releases flammable gases which may ignite spontaneously

H314Causes severe skin burns and eye damage

Precautionary statements

P210Keep away from heat/sparks/open flames/hot surfaces. — No smoking.

P223Keep away from any possible contact with water, because of violent reaction and possible flash fire.

P231+P232Handle under inert gas. Protect from moisture.

P280Wear protective gloves/protective clothing/eye protection/face protection.

P303+P361+P353IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower.

P305+P351+P338IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing.

TETRAKIS(ETHYLMETHYLAMINO)TITANIUM Chemical Properties,Usage,Production

Uses

Precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD).

General Description

Atomic number of base material: 22 Titanium