TETRAKIS(DIETHYLAMINO)TITANIUM
Description Reference- Product Name
- TETRAKIS(DIETHYLAMINO)TITANIUM
- CAS No.
- 4419-47-0
- Chemical Name
- TETRAKIS(DIETHYLAMINO)TITANIUM
- Synonyms
- TDEAT;amino)titanium(IV);titanium diethylamide;TITANIUM (IV) DIETHYLAMIDE;Titanium isopropoxide(TDEAT);TETRAKIS(DIETHYLAMINO)TITANIUM;Tetrakis(diethylamion)titanium;TITANIUM TETRAKIS(DIETHYLAMIDE);TETRAKIS (DIETHYLAMIDO) TITANIUM;Titanium(IV) Diethylamide 99.99%
- CBNumber
- CB8264181
- Molecular Formula
- C16H40N4Ti
- Formula Weight
- 336.38
- MOL File
- 4419-47-0.mol
TETRAKIS(DIETHYLAMINO)TITANIUM Property
- Melting point:
- 4 °C
- Boiling point:
- 112 °C0.1 mm Hg(lit.)
- Density
- 0.931 g/mL at 25 °C(lit.)
- refractive index
- n20/D 1.536(lit.)
- Flash point:
- -18 °F
- storage temp.
- Store at +2°C to +8°C.
- solubility
- Reacts with air.
- form
- liquid
- color
- yellow to orange
- Specific Gravity
- 0.95
- Hydrolytic Sensitivity
- 8: reacts rapidly with moisture, water, protic solvents
- Sensitive
- Moisture Sensitive
- BRN
- 3621431
- CAS DataBase Reference
- 4419-47-0(CAS DataBase Reference)
- NIST Chemistry Reference
- Tetrakis(diethylamino)titanium(4419-47-0)
- EPA Substance Registry System
- Ethanamine, N-ethyl-, titanium(4+) salt (4419-47-0)
Safety
- Hazard Codes
- F,C,Xi
- Risk Statements
- 11-14/15-34-36/37/38
- Safety Statements
- 26-36/37/39-43-45-37/39-16
- RIDADR
- UN 3398 4.3/PG 1
- WGK Germany
- 3
- F
- 10-21
- TSCA
- Yes
- HS Code
- 2921 19 50
- HazardClass
- 4.3
- PackingGroup
- II
Hazard and Precautionary Statements (GHS)
- Symbol(GHS)
-
- Signal word
- Danger
- Hazard statements
-
H225Highly Flammable liquid and vapour
H260In contact with water releases flammable gases which may ignite spontaneously
H314Causes severe skin burns and eye damage
- Precautionary statements
-
P210Keep away from heat/sparks/open flames/hot surfaces. — No smoking.
P223Keep away from any possible contact with water, because of violent reaction and possible flash fire.
P231+P232Handle under inert gas. Protect from moisture.
P280Wear protective gloves/protective clothing/eye protection/face protection.
P370+P378In case of fire: Use … for extinction.
P422Store contents under …
N-Bromosuccinimide Price
- Product number
- 407399
- Product name
- Tetrakis(diethylamido)titanium(IV)
- Purity
- technical grade
- Packaging
- 5G
- Price
- $205
- Updated
- 2023/06/20
- Product number
- 469866
- Product name
- Tetrakis(diethylamido)titanium(IV)
- Purity
- 99.999% trace metals basis
- Packaging
- 5g
- Price
- $318
- Updated
- 2023/01/07
- Product number
- 469866
- Product name
- Tetrakis(diethylamido)titanium(IV)
- Purity
- 99.999% trace metals basis
- Packaging
- 25g
- Price
- $575
- Updated
- 2023/01/07
- Product number
- 8.14018
- Product name
- Tetrakis(diethylamino)titanium
- Purity
- for synthesis
- Packaging
- 5ml
- Price
- $306
- Updated
- 2022/05/15
- Product number
- 040469
- Product name
- Tetrakis(diethylamino)titanium(IV)
- Purity
- 99.99% (metals basis)
- Packaging
- 50g
- Price
- $641
- Updated
- 2021/12/16
TETRAKIS(DIETHYLAMINO)TITANIUM Chemical Properties,Usage,Production
Description
Tetrakis (diethylamino) titanium is useful Ti-source precusor. Tetrakis (diethylamino) titanium is useful in TiN film deposition using the atomic layer deposition method1,2. It is also a useful compound during the process of etching a layer of diamond like carbon.
Reference
- Kim, Ju Youn, et al. "Comparison of TiN Films Deposited Using Tetrakisdimethylaminotitanium and Tetrakisdiethylaminotitanium by the Atomic Layer Deposition Method." Japanese Journal of Applied Physics 42.7A (2003):4245-4248.
- Katamreddy, Rajesh, et al. "Ti source precursors for atomic layer deposition of TiO2, STO and BST." Ecs Transactions 16.4(2008):660-71.
- Shoemaker, Erika Leigh, et al. "Process for reactive ion etching a layer of diamond like carbon." US, US8409458. 2013.
Chemical Properties
Clear dark red liquid
Uses
Precursors Packaged for Depositions Systems
General Description
Atomic number of base material: 22 Titanium
Purification Methods
Dissolve it in *C6H6, filter if a solid separates, evaporate under reduced pressure and distil it. It is an orange liquid which reacts violently with alcohols. [Bradley et al. J Chem Soc 3857 1960, Beilstein 4 IV 313.]
TETRAKIS(DIETHYLAMINO)TITANIUM Preparation Products And Raw materials
Raw materials
Preparation Products
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