ChemicalBook > CAS DataBase List > TETRAKIS(DIETHYLAMINO)TITANIUM

TETRAKIS(DIETHYLAMINO)TITANIUM

Description Reference

Product Name: TETRAKIS(DIETHYLAMINO)TITANIUM
CAS No.: 4419-47-0
Chemical Name: TETRAKIS(DIETHYLAMINO)TITANIUM
Synonyms: TDEAT;amino)titanium(IV);titanium diethylamide;TITANIUM (IV) DIETHYLAMIDE;Titanium isopropoxide(TDEAT);TETRAKIS(DIETHYLAMINO)TITANIUM;Tetrakis(diethylamion)titanium;TITANIUM TETRAKIS(DIETHYLAMIDE);Tertrakis（diethylamino）titanium;TETRAKIS (DIETHYLAMIDO) TITANIUM
CBNumber: CB8264181
Molecular Formula: C16H40N4Ti
Formula Weight: 336.38
MOL File: 4419-47-0.mol

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TETRAKIS(DIETHYLAMINO)TITANIUM Property

Melting point:: 4 °C
Boiling point:: 112 °C0.1 mm Hg(lit.)
Density: 0.931 g/mL at 25 °C(lit.)
refractive index: n20/D 1.536(lit.)
Flash point:: -18 °F
storage temp.: Store at +2°C to +8°C.
solubility: Reacts with air.
form: liquid
color: yellow to orange
Specific Gravity: 0.95
Hydrolytic Sensitivity: 8: reacts rapidly with moisture, water, protic solvents
Sensitive: Moisture Sensitive
BRN: 3621431
CAS DataBase Reference: 4419-47-0(CAS DataBase Reference)
NIST Chemistry Reference: Tetrakis(diethylamino)titanium(4419-47-0)
EPA Substance Registry System: Ethanamine, N-ethyl-, titanium(4+) salt (4419-47-0)

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Safety

Hazard Codes: F,C,Xi
Risk Statements: 11-14/15-34-36/37/38
Safety Statements: 26-36/37/39-43-45-37/39-16
RIDADR: UN 3398 4.3/PG 1
WGK Germany: 3
F: 10-21
TSCA: Yes
HS Code: 2921 19 50
HazardClass: 4.3
PackingGroup: II

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Hazard and Precautionary Statements (GHS)

Symbol(GHS)

Signal word

Danger

Hazard statements

H225Highly Flammable liquid and vapour

H260In contact with water releases flammable gases which may ignite spontaneously

H314Causes severe skin burns and eye damage

Precautionary statements

P210Keep away from heat/sparks/open flames/hot surfaces. — No smoking.

P223Keep away from any possible contact with water, because of violent reaction and possible flash fire.

P231+P232Handle under inert gas. Protect from moisture.

P280Wear protective gloves/protective clothing/eye protection/face protection.

P370+P378In case of fire: Use … for extinction.

P422Store contents under …

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N-Bromosuccinimide Price

Sigma-Aldrich

Product number: 407399
Product name: Tetrakis(diethylamido)titanium(IV)
Purity: technical grade
Packaging: 5G
Price: $205
Updated: 2023/06/20

Sigma-Aldrich

Product number: 469866
Product name: Tetrakis(diethylamido)titanium(IV)
Purity: 99.999% trace metals basis
Packaging: 5g
Price: $318
Updated: 2023/01/07

Sigma-Aldrich

Product number: 469866
Product name: Tetrakis(diethylamido)titanium(IV)
Purity: 99.999% trace metals basis
Packaging: 25g
Price: $575
Updated: 2023/01/07

Sigma-Aldrich

Product number: 8.14018
Product name: Tetrakis(diethylamino)titanium
Purity: for synthesis
Packaging: 5ml
Price: $306
Updated: 2022/05/15

Strem Chemicals

Product number: 22-1050
Product name: Tetrakis(diethylamino)titanium(IV), 99%
Packaging: 5g
Price: $91
Updated: 2024/03/01

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TETRAKIS(DIETHYLAMINO)TITANIUM Chemical Properties,Usage,Production

Description

Tetrakis (diethylamino) titanium is useful Ti-source precusor. Tetrakis (diethylamino) titanium is useful in TiN film deposition using the atomic layer deposition method^1,2. It is also a useful compound during the process of etching a layer of diamond like carbon.

Reference

Kim, Ju Youn, et al. "Comparison of TiN Films Deposited Using Tetrakisdimethylaminotitanium and Tetrakisdiethylaminotitanium by the Atomic Layer Deposition Method." Japanese Journal of Applied Physics 42.7A (2003):4245-4248.
Katamreddy, Rajesh, et al. "Ti source precursors for atomic layer deposition of TiO2, STO and BST." Ecs Transactions 16.4(2008):660-71.
Shoemaker, Erika Leigh, et al. "Process for reactive ion etching a layer of diamond like carbon." US, US8409458. 2013.

Chemical Properties

Clear dark red liquid

Uses

Precursors Packaged for Depositions Systems

General Description

Atomic number of base material: 22 Titanium

reaction suitability

core: titanium
reagent type: catalyst

Purification Methods

Dissolve it in *C6H6, filter if a solid separates, evaporate under reduced pressure and distil it. It is an orange liquid which reacts violently with alcohols. [Bradley et al. J Chem Soc 3857 1960, Beilstein 4 IV 313.]

TETRAKIS(DIETHYLAMINO)TITANIUM Preparation Products And Raw materials

Raw materials

Preparation Products

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4419-47-0, TETRAKIS(DIETHYLAMINO)TITANIUMRelated Search:

TETRAKIS(ACETONITRILE)SILVER(I) TETRAFLUOROBORATE Trityl tetrakis(pentafluorophenyl)borate Tetrakis(triphenylphosphine)nickel TETRAKIS(DIMETHYLAMINO)ZIRCONIUM Germanium dimethylamide Vanadium tetrakis(dimethylamide) TETRAKIS(DIMETHYLAMINO)TIN TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM Tetrakis(ethylmethylamino)vanadium(IV) TETRAKIS(DIETHYLAMINO)HAFNIUM Tetrakis(triphenylphosphine)palladium TETRAKIS(DIETHYLAMINO)ZIRCONIUM TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM TETRAKIS(DIMETHYLAMIDO)HAFNIUM(IV) TETRAKIS(DIMETHYLAMINO)TITANIUM TETRAKIS(DIETHYLAMINO)TITANIUM BIS(DIETHYLAMINO)BIS(DIMETHYLAMINO) TITANIUM, 99.99% TETRAKIS(ETHYLMETHYLAMINO)TITANIUM

TDEAT

TETRAKIS (DIETHYLAMIDO) TITANIUM

TETRAKIS(DIETHYLAMINO)TITANIUM

TETRAKIS DIETHYL AMINO TITANIUM (IV)

TITANIUM (IV) DIETHYLAMIDE

TITANIUM TETRAKIS(DIETHYLAMIDE)

Titanium, tetrakis(diethylamino)-

TETRAKIS(DIETHYLAMINO)TITANIUM, 99.999%

TETRAKIS(DIETHYLAMINO)TITANIUM, TECH.

Tetrakis(diethylamino)titanium,99.99%(metalsbasis)

Tetrakis(diethylamino)titanium,99%

Ethanamine, N-ethyl-, titanium(4+) salt

tetrakis(diethylamido)titanium(iv)

titanium diethylamide

Tetrakis(diethylamino)titanium(IV), Titanium(IV) tetrakis(diethylamide)

Tetrakis(diethylamion)titanium

Titanium(IV) tetrakis(diethylamide)

Tetrakis(diethylamino)titanium, 99%, 22-1050, contained in 50 ml Swagelok cylinder for CVD/ALD

Tetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml Swagelok cylinder for CVD/ALD

Titanium(IV) Diethylamide 99.99%

Tetrakis(diethylaMino)titaniuM(IV), 99.99% (Metals basis)

TETRAKIS(DIETHYLAMINO)TITANIUM FOR SYNTH

TITANIUM TETRAKIS(DIETHYLAMIDE), 99+%

Tetrakis(diethylaMino)titaniuM(IV), 99%, 22-1050, contained in 50 Ml Swagelok cylinder (96-1070) for CVD/ALD

Tetrakis(diethylamido)titanium(IV) 99.999% trace metals basis

Tetrakis(diethylamino)titanium for synthesis

Tetrakis(diethylamino)titanium(IV), 99%, 22-1050, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD

amino)titanium(IV)

TETRAKIS(DIETHYLAMINO)TITANIUM ISO 9001：2015 REACH

Titanium isopropoxide(TDEAT)

Tertrakis（diethylamino）titanium

Tetrakis(diethylamido)titanium(IV), TDEAT

4419-47-0

TiNC2H524

C2H52N4Ti

C8H40N4TI

C4H11N14Ti

C16H40N4Ti

Catalysis and Inorganic Chemistry

Titanium

metal amide complex