TANTALUM NITRIDE ETCH

Safety

Hazard Codes 

T+,C

Risk Statements 

26/27/28-35

Safety Statements 

26-28-36/37/39-45

WGK Germany 

WGK 2

Storage Class

6.1B - Non-combustible acute toxic Cat. 1 and 2
very toxic hazardous materials

Hazard Classifications

Acute Tox. 1 Dermal
Acute Tox. 2 Oral
Acute Tox. 3 Inhalation
Eye Dam. 1
Met. Corr. 1
Skin Corr. 1A

Hazard and Precautionary Statements (GHS)

Symbol(GHS)

Signal word

Danger

Hazard statements

H290May be corrosive to metals

H314Causes severe skin burns and eye damage

H331Toxic if inhaled

Precautionary statements

P234Keep only in original container.

P261Avoid breathing dust/fume/gas/mist/vapours/spray.

P280Wear protective gloves/protective clothing/eye protection/face protection.

P303+P361+P353IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower.

P305+P351+P338IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing.

TANTALUM NITRIDE ETCH Chemical Properties,Usage,Production

Uses

Etchant solution for precise, clean etching of tantalum, tantalum nitride, and tantalum oxide thin films and resists in electronics applications

General Description

Tantalum nitride etchant is a high purity etchant systems for precise, clean etching of tantalum, tantalum nitride, and tantalum oxide thin films and resists in electronics applications.