Basic information Safety Supplier Related

(TERT-BUTYLIMIDO)TRIS(ETHYLMETHYLAMINO)TANTALUM

Basic information Safety Supplier Related

(TERT-BUTYLIMIDO)TRIS(ETHYLMETHYLAMINO)TANTALUM Basic information

Product Name:
(TERT-BUTYLIMIDO)TRIS(ETHYLMETHYLAMINO)TANTALUM
Synonyms:
  • TRIS(ETHYLMETHYLAMIDO)(TERT-BUTYLIMIDO)TANTALUM(V)
  • TRIS(ETHYLMETHYLAMINO)-TERT-BUTYLAMIDO TANTALUM
  • (TERT-BUTYLIMIDO)TRIS(ETHYLMETHYLAMINO)TANTALUM
  • (T-BUTYLIMIDO)TRIS(ETHYLMETHYLAMINO)TANTALUM(V),(99.99%-TA)PURATREM
  • (t-Butylimido)tris(ethylmethylamino)tantalum(V), (99.99%-Ta) PURATREM TBTEMT
  • amido)(tert-butyL
  • imido)tantaL
  • Tris(ethyL
CAS:
511292-99-2
MF:
C13H33N4Ta
MW:
426.38
Product Categories:
  • TantalumVapor Deposition Precursors
  • Catalysis and Inorganic Chemistry
  • Chemical Synthesis
  • Precursors by Metal
  • Tantalum
Mol File:
511292-99-2.mol
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(TERT-BUTYLIMIDO)TRIS(ETHYLMETHYLAMINO)TANTALUM Chemical Properties

Density 
1.323 g/mL at 21 °C (lit.)
Flash point:
64 °F
form 
liquid
color 
yellow
Sensitive 
air sensitive, moisture sensitive
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Safety Information

Hazard Codes 
C
Risk Statements 
10-14/15-34
Safety Statements 
26-36/37/39-43-45
RIDADR 
UN 3398 4.3/PG 2
WGK Germany 
3

MSDS

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(TERT-BUTYLIMIDO)TRIS(ETHYLMETHYLAMINO)TANTALUM Usage And Synthesis

General Description

Atomic number of base material: 73 Tantalum

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