Product Identification

Product Name

Tetramethylammonium hydroxide pentahydrate

Synonyms

Methanaminium, N,N,N-trimethyl-, hydroide, pentahydrate

CAS

10424-65-4

Formula

C4H23NO6

Molecular Weight

181.16

EINECS

200-882-9

Merck

12,9363

Beilstein/Gmelin

3714235

Beilstein Reference

0-04-00-00050

Physical and Chemical Properties

Appearance

White to off-white solid with an ammonia-like odor.

Solubility in water

Soluble

Melting Point

65-68

Density

1.829 g/cm3 (20 C)

Usage

An anisotropic etchant of silicon. Also used as a basic solvent in the development of acidic photoresist in the photolithography process.

Vapor Density

6.3

First Aid Measures

Ingestion

If victim is conscious and alert, give 2-4 cupfuls of milk or water. Never give anything by mouth to an unconscious person. Get medical aid immediately.

Inhalation

Get medical aid immediately. Remove from exposure to fresh air immediately. If not breathing, give artificial respiration. If breathing is difficult, give oxygen.

Skin

Get medical aid immediately. Flush skin with plenty of soap and water for at least 15 minutes while removing contaminated clothing and shoes. Discard contaminated clothing in a manner which limits further exposure.

Eyes

Flush eyes with plenty of water for at least 15 minutes, occasionally lifting the upper and lower eyelids. Get medical aid immediately. Do NOT allow victim to rub or keep eyes closed.

Handling and Storage

Storage

Store in a tightly closed container. Store in a cool, dry, well-ventilated area away from incompatible substances. Corrosives area.

Handling

Wash thoroughly after handling. Remove contaminated clothing and wash before reuse. Use with adequate ventilation. Minimize dust generation and accumulation. Do not get in eyes, on skin, or on clothing. Keep container tightly closed. Avoid ingestion and inhalation. Discard contaminated shoes.

Hazards Identification

Ingestion

May cause irritation of the digestive tract.

Inhalation

Causes respiratory tract irritation.

Skin

Causes skin burns.

Eyes

Causes severe eye burns.

Hazards

When heated, vapors may form explosive mixtures with air: indoors, outdoors, and sewers explosion hazards.

EC Risk Phrase

R 24/25 34

EC Safety Phrase

S 26 28 36/37/39 45

UN (DOT)

1835

Exposure Controls/Personal Protection

Personal Protection

Eyes: Wear appropriate protective eyeglasses or chemical safety goggles as described by OSHA's eye and face protection regulations in 29 CFR 1910.133 or European Standard EN166. Skin: Wear appropriate protective gloves to prevent skin exposure. Clothing: Wear appropriate protective clothing to prevent skin exposure.

Respirators

Follow the OSHA respirator regulations found in 29CFR 1910.134 or European Standard EN 149. Always use a NIOSH or European Standard EN 149 approved respirator when necessary.

Fire Fighting Measures

Fire Fighting

Wear a self-contained breathing apparatus in pressure-demand, MSHA/NIOSH (approved or equivalent), and full protective gear. To extinguish fire, use water, dry chemical, chemical foam, or alcohol-resistant foam.

Fire Potential

Combustible material: may burn but does not ignite readily.

Accidental Release Measures

Small spills/leaks

Sweep up or absorb material, then place into a suitable clean, dry, closed container for disposal. Avoid generating dusty conditions. Provide ventilation.

Stability and Reactivity

Stability

Stable under normal temperatures and pressures. Absorbs carbon dioxide from the air.

Incompatibilities

Strong oxidizing agents, strong acids.

Decomposition

Nitrogen oxides, carbon monoxide, carbon dioxide, nitrogen, ammonia, amines.

Combustion Products

Fire may produce irritating, corrosive and/or toxic gases.

Transport Information

UN Number

1835

Hazard Class

8

Packing Group

II