TRIS(DIMETHYLAMINO)SILANE

Product Name: TRIS(DIMETHYLAMINO)SILANE
CAS No.: 15112-89-7
Chemical Name: TRIS(DIMETHYLAMINO)SILANE
Synonyms: TDMAS;3DMAS;DK087;LS 1460;amino)siL;(Me2N)3SiH;3DMAS : [(CH3)2N]3SiH;Tris(dimethyamino)silane;Tri(dimethylamino)silane;TRIS(DIMETHYLAMINO)SILANE
CBNumber: CB1241150
Molecular Formula: C6H19N3Si
Formula Weight: 161.32
MOL File: 15112-89-7.mol

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TRIS(DIMETHYLAMINO)SILANE Property

Melting point:: <0°C
Boiling point:: 145 °C
Density: 0,838 g/cm³
refractive index: 1.4247
Flash point:: 25°C
pka: 10.93±0.70(Predicted)
form: liquid
color: colorless to light yellow
Specific Gravity: 0.84
Sensitive: air sensitive, moisture sensitive
Hydrolytic Sensitivity: 8: reacts rapidly with moisture, water, protic solvents
EPA Substance Registry System: N,N,N',N',N'',N''-Hexamethylsilanetriamine (15112-89-7)

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Safety

Hazard Codes: F,C
Risk Statements: 10-36/37/38-52/53-34-29-20-15-11
Safety Statements: 16-26-36/37/39-45-43
RIDADR: 1993
WGK Germany: 3
RTECS: VV5800000
TSCA: Yes
Toxicity: rabbit,LD50,skin,477mg/kg (477mg/kg),LIVER: OTHER CHANGESLUNGS, THORAX, OR RESPIRATION: CHRONIC PULMONARY EDEMA,Toxicology and Industrial Health. Vol. 5, Pg. 45, 1989.

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Hazard and Precautionary Statements (GHS)

Symbol(GHS)

Signal word

Danger

Hazard statements

H225Highly Flammable liquid and vapour

H261In contact with water releases flammable gas

H302Harmful if swallowed

H311Toxic in contact with skin

H314Causes severe skin burns and eye damage

H330Fatal if inhaled

Precautionary statements

P210Keep away from heat/sparks/open flames/hot surfaces. — No smoking.

P231+P232Handle under inert gas. Protect from moisture.

P280Wear protective gloves/protective clothing/eye protection/face protection.

P303+P361+P353IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower.

P305+P351+P338IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing.

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N-Bromosuccinimide Price

Sigma-Aldrich

Product number: 759562
Product name: Tris(dimethylamino)silane
Purity: packaged for use in deposition systems
Packaging: 25g
Price: $980
Updated: 2024/03/01

Sigma-Aldrich

Product number: 570133
Product name: Tris(dimethylamino)silane
Purity: electronic grade, 99.999%
Packaging: 25g
Price: $214
Updated: 2024/03/01

Strem Chemicals

Product number: 14-8750
Product name: Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM
Packaging: 5g
Price: $75
Updated: 2024/03/01

Strem Chemicals

Product number: 14-8750
Product name: Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM
Packaging: 25g
Price: $214
Updated: 2024/03/01

Strem Chemicals

Product number: 98-4035
Product name: Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM, 14-8750, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD
Packaging: 25g
Price: $1211
Updated: 2024/03/01

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TRIS(DIMETHYLAMINO)SILANE Chemical Properties,Usage,Production

Uses

Tris(dimethylamino)silane (TDMAS) is used as an organosilicon source for the deposition of Si oxynitride; carbonitride; nitride and oxide thin films. It is also used to form multicomponent silicon containing thin films. The depositions can be carried out at low substrate temperatures (<150). The melting point and vapor pressure of TDMAS is in a suitable working range; thus making it a very good vapor deposition precursor.

General Description

Please inquire for quantity, pricing, and packaging options.

TRIS(DIMETHYLAMINO)SILANE Preparation Products And Raw materials

Raw materials

Preparation Products

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TRIS(DIMETHYLAMINO)SILANE Suppliers

China 69 Germany 3 Japan 1 Russia 1 Singapore 1 United Kingdom 3 United States 13 Global 91

Baoji Funuokang Industrial Co., Ltd

Tel: 13220096790
Email: 1754423088@qq.com
Country: China
ProdList: 2996
Advantage: 58

Shanghai Boyle Chemical Co., Ltd.

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Fax: +86-21-57758967
Email: sales@boylechem.com
Country: China
ProdList: 2208
Advantage: 55

J & K SCIENTIFIC LTD.

Tel: 010-82848833 400-666-7788
Fax: 86-10-82849933
Email: jkinfo@jkchemical.com
Country: China
ProdList: 96815
Advantage: 76

Meryer (Shanghai) Chemical Technology Co., Ltd.

Tel: 021-61259108 18621169109
Fax: 86-21-61259102
Email: market03@meryer.com
Country: China
ProdList: 40228
Advantage: 62

INTATRADE GmbH

Tel: +49 3493/605464
Fax: +49 3493/605470
Email: sales@intatrade.de
Country: Germany
ProdList: 3572
Advantage: 66

Beijing HwrkChemical Technology Co., Ltd

Tel: 010-89508211 18501085097
Fax: 010-89508210
Email: sales.bj@hwrkchemical.com
Country: China
ProdList: 8418
Advantage: 55

Energy Chemical

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Fax: 021-58436166
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Shanghai Boc Chemical Co.,Ltd

Tel: 021-34975603-808 18721111801
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Country: China
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Shanghai Hanhong Scientific Co.,Ltd.

Tel: 021-54306202 13764082696
Email: info@hanhongsci.com
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Novel Chemical

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Fax: +86-21-64855560-8021
Email: sales@novelglobal.com
Country: China
ProdList: 124
Advantage: 62

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View Lastest Price from TRIS(DIMETHYLAMINO)SILANE manufacturers

Shaanxi Dideu Medichem Co. Ltd

Product: TRIS(DIMETHYLAMINO)SILANE 15112-89-7
Price: US $0.10/KG
Min. Order: 1KG
Purity: 99.0%
Supply Ability: 1000 tons
Release date: 2024-07-15

Career Henan Chemical Co

Product: tris(dimethylamino)silane 15112-89-7
Price: US $1.00/KG
Min. Order: 1KG
Purity: Min98% HPLC
Supply Ability: g/kg/ton
Release date: 2019-12-23

15112-89-7, TRIS(DIMETHYLAMINO)SILANERelated Search:

TRIS(TRIMETHYLSILYL)METHANE Tris(dibenzylideneacetone)dipalladium BIS(MU-DIMETHYLAMINO)TETRAKIS(DIMETHYLAMINO)DIALUMINUM TRIS(DIMETHYLAMIDO)GALLIUM(III) 98 Tris(dibenzylideneacetone)dipalladium-chloroform adduct TRIS(DIMETHYLAMINO)ANTIMONY TRIS(DIMETHYLAMINO)SILANE TRIS(DIMETHYLAMINO)PHENYLSILANE TETRAKIS(DIMETHYLAMINO)SILANE TETRAKIS(DIETHYLAMINO)SILANE TRIS(DIMETHYLAMINO)ETHYLSILANEETHYL TRIS(DIMETHYLAMINO) SILANE TRIS(DIMETHYLAMINO)METHYLSILANE TRIS(DIMETHYLAMINO)CHLOROSILANE TETRAKIS(ETHYLMETHYLAMINO)SILANE ETHYL TRIS(DIMETHYLAMINO) SILANE 1,2-(Trisdimethylaminosilyl)ethane (heptadecaflroro-1,1,2,2-tetrahydrodecyl)tris(dimethylamino)silane TRIS(DIETHYLAMINO)-SILANE

TRIS(DIMETHYLAMINO)SILANE

n,n,n’,n’,n’’,n’’-hexamethyl-silanetriamin

n,n,n’,n’,n’’,n’’-hexamethylsilanetriamine

N,N,N’,N’,N’’,N’’-hexamethyl-Silanetriamine

TRIS(DIMETHYLAMINO)SILANE 99+%

N,N',N''-(Silanetriyl)tris(dimethylamine)

N,N',N''-Silanetriyltris(dimethylamine)

TRIS(DIMETHYLAMINO)SILANE, 99.9+%

Tris(diMethylaMino)silane, 99+%, 14-8750, contained in 50 Ml Swagelok cylinder (96-1070) for CVD/ALD

(Me2N)3SiH

TDMAS

Tris(dimethylamido)silane

Tris(dimethylamino)silane electronic grade, 99.999%

Tris(dimethylamino)silane packaged for use in deposition systems

Tris(dimethyamino)silane

N,N,N',N',N'',N''-hexamethyl-Silanetriamine tris(Dimethylamino)silane n,n,n',n',n'',n''-hexamethylsilanetriamine n,n,n',n',n'',n''-hexamethyl-silanetriamin Silanetriamine,N,N,N',N',N'',N''-hexamethyl-

Tri(dimethylamino)silane

LS 1460

Tris(dimethylamino)silane, 99+% 3DMAS

3DMAS : [(CH3)2N]3SiH

Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM

Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM, 14-8750, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD

Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM, 14-8750, contained in 50 ml Swagelok cylinder (96-1070) for CVD/ALD

3DMAS

Tris(dimethylamino)silane Liquid

amino)siL

Silanetriamine, N,N,N',N',N'',N''-hexamethyl-

Tris(dimethylamino)silane 3DMAS

TRIS(DIMETHYLAMINO)SILANE ISO 9001：2015 REACH

DK087

N,N,N',N',N'',N''-Hexamethylsilanetriamine

15112-89-7

CH32N3SiH

C6H19N3Si

ALD Precursors

organosilicon compounds