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TRIS(DIMETHYLAMINO)SILANE

Product Name
TRIS(DIMETHYLAMINO)SILANE
CAS No.
15112-89-7
Chemical Name
TRIS(DIMETHYLAMINO)SILANE
Synonyms
TDMAS;3DMAS;DK087;LS 1460;amino)siL;(Me2N)3SiH;3DMAS : [(CH3)2N]3SiH;Tris(dimethyamino)silane;Tri(dimethylamino)silane;TRIS(DIMETHYLAMINO)SILANE
CBNumber
CB1241150
Molecular Formula
C6H19N3Si
Formula Weight
161.32
MOL File
15112-89-7.mol
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TRIS(DIMETHYLAMINO)SILANE Property

Melting point:
<0°C
Boiling point:
145 °C
Density 
0,838 g/cm3
refractive index 
1.4247
Flash point:
25°C
pka
10.93±0.70(Predicted)
form 
liquid
color 
colorless to light yellow
Specific Gravity
0.84
Sensitive 
air sensitive, moisture sensitive
Hydrolytic Sensitivity
8: reacts rapidly with moisture, water, protic solvents
EPA Substance Registry System
N,N,N',N',N'',N''-Hexamethylsilanetriamine (15112-89-7)
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Safety

Hazard Codes 
F,C
Risk Statements 
10-36/37/38-52/53-34-29-20-15-11
Safety Statements 
16-26-36/37/39-45-43
RIDADR 
1993
WGK Germany 
3
RTECS 
VV5800000
TSCA 
Yes
Toxicity
rabbit,LD50,skin,477mg/kg (477mg/kg),LIVER: OTHER CHANGESLUNGS, THORAX, OR RESPIRATION: CHRONIC PULMONARY EDEMA,Toxicology and Industrial Health. Vol. 5, Pg. 45, 1989.
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Hazard and Precautionary Statements (GHS)

Symbol(GHS)
Signal word
Danger
Hazard statements

H225Highly Flammable liquid and vapour

H261In contact with water releases flammable gas

H302Harmful if swallowed

H311Toxic in contact with skin

H314Causes severe skin burns and eye damage

H330Fatal if inhaled

Precautionary statements

P210Keep away from heat/sparks/open flames/hot surfaces. — No smoking.

P231+P232Handle under inert gas. Protect from moisture.

P280Wear protective gloves/protective clothing/eye protection/face protection.

P303+P361+P353IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower.

P305+P351+P338IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing.

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N-Bromosuccinimide Price

Sigma-Aldrich
Product number
759562
Product name
Tris(dimethylamino)silane
Purity
packaged for use in deposition systems
Packaging
25g
Price
$980
Updated
2024/03/01
Sigma-Aldrich
Product number
570133
Product name
Tris(dimethylamino)silane
Purity
electronic grade, 99.999%
Packaging
25g
Price
$214
Updated
2024/03/01
Strem Chemicals
Product number
14-8750
Product name
Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM
Packaging
5g
Price
$75
Updated
2024/03/01
Strem Chemicals
Product number
14-8750
Product name
Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM
Packaging
25g
Price
$214
Updated
2024/03/01
Strem Chemicals
Product number
98-4035
Product name
Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM, 14-8750, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD
Packaging
25g
Price
$1211
Updated
2024/03/01
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TRIS(DIMETHYLAMINO)SILANE Chemical Properties,Usage,Production

Uses

Tris(dimethylamino)silane (TDMAS) is used as an organosilicon source for the deposition of Si oxynitride; carbonitride; nitride and oxide thin films. It is also used to form multicomponent silicon containing thin films. The depositions can be carried out at low substrate temperatures (<150). The melting point and vapor pressure of TDMAS is in a suitable working range; thus making it a very good vapor deposition precursor.

General Description

Please inquire for quantity, pricing, and packaging options.

TRIS(DIMETHYLAMINO)SILANE Preparation Products And Raw materials

Raw materials

Preparation Products

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View Lastest Price from TRIS(DIMETHYLAMINO)SILANE manufacturers

Career Henan Chemical Co
Product
tris(dimethylamino)silane 15112-89-7
Price
US $1.00/KG
Min. Order
1KG
Purity
Min98% HPLC
Supply Ability
g/kg/ton
Release date
2019-12-23

15112-89-7, TRIS(DIMETHYLAMINO)SILANERelated Search:

TRIS(TRIMETHYLSILYL)METHANE Tris(dibenzylideneacetone)dipalladium BIS(MU-DIMETHYLAMINO)TETRAKIS(DIMETHYLAMINO)DIALUMINUM TRIS(DIMETHYLAMIDO)GALLIUM(III) 98 Tris(dibenzylideneacetone)dipalladium-chloroform adduct TRIS(DIMETHYLAMINO)ANTIMONY TRIS(DIMETHYLAMINO)SILANE TRIS(DIMETHYLAMINO)PHENYLSILANE TETRAKIS(DIMETHYLAMINO)SILANE TETRAKIS(DIETHYLAMINO)SILANE TRIS(DIMETHYLAMINO)ETHYLSILANEETHYL TRIS(DIMETHYLAMINO) SILANE TRIS(DIMETHYLAMINO)METHYLSILANE TRIS(DIMETHYLAMINO)CHLOROSILANE TETRAKIS(ETHYLMETHYLAMINO)SILANE ETHYL TRIS(DIMETHYLAMINO) SILANE 1,2-(Trisdimethylaminosilyl)ethane (heptadecaflroro-1,1,2,2-tetrahydrodecyl)tris(dimethylamino)silane TRIS(DIETHYLAMINO)-SILANE

  • TRIS(DIMETHYLAMINO)SILANE
  • n,n,n’,n’,n’’,n’’-hexamethyl-silanetriamin
  • n,n,n’,n’,n’’,n’’-hexamethylsilanetriamine
  • N,N,N’,N’,N’’,N’’-hexamethyl-Silanetriamine
  • TRIS(DIMETHYLAMINO)SILANE 99+%
  • N,N',N''-(Silanetriyl)tris(dimethylamine)
  • N,N',N''-Silanetriyltris(dimethylamine)
  • TRIS(DIMETHYLAMINO)SILANE, 99.9+%
  • Tris(diMethylaMino)silane, 99+%, 14-8750, contained in 50 Ml Swagelok cylinder (96-1070) for CVD/ALD
  • (Me2N)3SiH
  • TDMAS
  • Tris(dimethylamido)silane
  • Tris(dimethylamino)silane electronic grade, 99.999%
  • Tris(dimethylamino)silane packaged for use in deposition systems
  • Tris(dimethyamino)silane
  • N,N,N',N',N'',N''-hexamethyl-Silanetriamine tris(Dimethylamino)silane n,n,n',n',n'',n''-hexamethylsilanetriamine n,n,n',n',n'',n''-hexamethyl-silanetriamin Silanetriamine,N,N,N',N',N'',N''-hexamethyl-
  • Tri(dimethylamino)silane
  • LS 1460
  • Tris(dimethylamino)silane, 99+% 3DMAS
  • 3DMAS : [(CH3)2N]3SiH
  • Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM
  • Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM, 14-8750, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD
  • Tris(dimethylamino)silane, 99+%, 3DMAS (99.999%-Si) PURATREM, 14-8750, contained in 50 ml Swagelok cylinder (96-1070) for CVD/ALD
  • 3DMAS
  • Tris(dimethylamino)silane Liquid
  • amino)siL
  • Silanetriamine, N,N,N',N',N'',N''-hexamethyl-
  • Tris(dimethylamino)silane 3DMAS
  • TRIS(DIMETHYLAMINO)SILANE ISO 9001：2015 REACH
  • DK087
  • 15112-89-7
  • CH32N3SiH
  • C6H19N3Si
  • ALD Precursors
  • organosilicon compounds