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TETRAKIS(DIMETHYLAMINO)TITANIUM

Product Name
TETRAKIS(DIMETHYLAMINO)TITANIUM
CAS No.
3275-24-9
Chemical Name
TETRAKIS(DIMETHYLAMINO)TITANIUM
Synonyms
TDMAT;amino)titanium;Tetrakis(dimethyL;TDMAT: Ti[N(CH3)2]4;titanium dimethylamide;TITANIUM(IV) DIMETHYLAMIDE;TETRAKIS(DIMETHYLAMINO)TITANIUM;TITANIUM TETRAKIS(DIMETHYLAMIDE);TETRAKIS (DIMETHYLAMIDO) TITANIUM;Tetra(dimethylamino) titanium(IV)
CBNumber
CB3127757
Molecular Formula
C2H7NTi
Formula Weight
92.95
MOL File
3275-24-9.mol
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TETRAKIS(DIMETHYLAMINO)TITANIUM Property

Melting point:
<4°C
Boiling point:
50 °C0.5 mm Hg(lit.)
Density 
0.947 g/mL at 25 °C(lit.)
refractive index 
1.55
Flash point:
-22 °F
storage temp. 
Flammables area
form 
liquid
Specific Gravity
0.96
color 
yellow to orange
Hydrolytic Sensitivity
8: reacts rapidly with moisture, water, protic solvents
Sensitive 
Moisture Sensitive
InChIKey
MNWRORMXBIWXCI-UHFFFAOYSA-N
CAS DataBase Reference
3275-24-9(CAS DataBase Reference)
NIST Chemistry Reference
Tetrakis(dimethylamino)titanium(3275-24-9)
EPA Substance Registry System
Methanamine, N-methyl-, titanium(4+) salt (3275-24-9)
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Safety

Hazard Codes 
F,C,Xi
Risk Statements 
11-14-34
Safety Statements 
16-26-36/37/39-43-45
RIDADR 
UN 3398 4.3/PG 1
WGK Germany 
3
TSCA 
Yes
HazardClass 
4.3
PackingGroup 
II
HS Code 
29319090
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Hazard and Precautionary Statements (GHS)

Symbol(GHS)
Signal word
Danger
Hazard statements

H225Highly Flammable liquid and vapour

H260In contact with water releases flammable gases which may ignite spontaneously

H314Causes severe skin burns and eye damage

Precautionary statements

P210Keep away from heat/sparks/open flames/hot surfaces. — No smoking.

P223Keep away from any possible contact with water, because of violent reaction and possible flash fire.

P231+P232Handle under inert gas. Protect from moisture.

P280Wear protective gloves/protective clothing/eye protection/face protection.

P303+P361+P353IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower.

P305+P351+P338IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing.

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N-Bromosuccinimide Price

Sigma-Aldrich
Product number
469858
Product name
Tetrakis(dimethylamido)titanium(IV)
Purity
99.999% trace metals basis
Packaging
5g
Price
$239
Updated
2024/03/01
Sigma-Aldrich
Product number
469858
Product name
Tetrakis(dimethylamido)titanium(IV)
Purity
99.999% trace metals basis
Packaging
25g
Price
$694
Updated
2024/03/01
TCI Chemical
Product number
T2230
Product name
Tetrakis(dimethylamino)titanium(IV)
Purity
>97.0%(T)
Packaging
1g
Price
$48
Updated
2024/03/01
TCI Chemical
Product number
T2230
Product name
Tetrakis(dimethylamino)titanium(IV)
Purity
>97.0%(T)
Packaging
5g
Price
$136
Updated
2022/04/27
Alfa Aesar
Product number
042932
Product name
Tetrakis(dimethylamino)titanium(IV)
Purity
99.9% (metals basis)
Packaging
5g
Price
$182.65
Updated
2024/03/01
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TETRAKIS(DIMETHYLAMINO)TITANIUM Chemical Properties,Usage,Production

Chemical Properties

clear yellow to orange liquid

Uses

Precursors Packaged for Depositions Systems

Uses

Tetrakis(dimethylamido)titanium(IV) (TDMAT) is a precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD)and titanium dioxide thin films by atomic layer deposition (ALD).TDMAT undergoes exothermal reaction with excess cyclopentadiene to yield tris(dimethylamido)(η5-cyclopentadienyl)titanium(IV).

General Description

Atomic number of base material: 22 Titanium

TETRAKIS(DIMETHYLAMINO)TITANIUM Preparation Products And Raw materials

Raw materials

Preparation Products

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TETRAKIS(DIMETHYLAMINO)TITANIUM Suppliers

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3275-24-9, TETRAKIS(DIMETHYLAMINO)TITANIUMRelated Search:

TETRAKIS(DIETHYLAMINO)TITANIUM Tetrakis(4-aminophenyl)methane TETRAKIS(ACETONITRILE)SILVER(I) TETRAFLUOROBORATE Trityl tetrakis(pentafluorophenyl)borate TETRAKIS(ETHYLMETHYLAMINO)HAFNIUM Tetrakis(ethylmethylamino)vanadium(IV) TETRAKIS(DIETHYLAMINO)ZIRCONIUM TETRAKIS(ETHYLMETHYLAMINO)ZIRCONIUM Tetrakis(triphenylphosphine)nickel TETRAKIS(DIETHYLAMINO)HAFNIUM TETRAKIS(DIMETHYLAMIDO)HAFNIUM(IV) TETRAKIS(DIMETHYLAMINO)ZIRCONIUM Germanium dimethylamide Vanadium tetrakis(dimethylamide) TETRAKIS(DIMETHYLAMINO)TIN TETRAKIS(2-ETHYLHEXOXY)SILANE Tetrakis(p-broMophenyl)Methane Titanium ethylhexoxide

  • Tetrakis(dimethylamino)titanium(IV), 99% TDMAT, 93-2240, contained in 50 ml Swagelok cylinder for CVD/ALD
  • Tetrakis(dimethylamino)titanium, (trace metal basis), 99.99%
  • Tetrakis(dimethylamino)titanium(IV), 99% TDMAT
  • Tetrakis(diMethylaMino)titaniuM, 99.99%, (trace Metal basis)
  • Tetrakis(diMethylaMino)titaniuM, 99.99% 25GR
  • Tetrakis(DiMethylaMino)TitaniuM (Metals Basis)
  • Tetrakis(diMethylaMino)titaniuM, 99.99% Metals basis
  • Tetrakis(diMethylaMido)titaniuM(IV) 99.999% trace Metals basis
  • Tetrakis(diMethylaMino)titaniuM(IV), 99.9% (Metals basis)
  • Tetrakis(dimethylamino)titanium(IV), 99% TDMAT (99.99%-Ti)
  • Tetrakis(dimethylamino)titanium(IV), 99% TDMAT, 93-2240, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD
  • Tetrakis(dimethylamino)titanium(IV), 99% TDMAT (99.99%-Ti) PURATREM
  • Tetrakis(dimethylamino)titanium(IV), 99% TDMAT, 93-2240, contained in high-temp 50 ml Swagelok(R) cylinder (96-1071) for CVD/ALD
  • Tetrakis(dimethylamino)titanium, 99.8%, 99.99% metals basis
  • TDMAT: Ti[N(CH3)2]4
  • Tetrakis(dimethylamino)titanium(IV), 99% TDMAT, 93-2240, contained in 50 ml Swagelok cylinder (96-1070) for CVD/ALD
  • Tetrakis(dimethylamino)titanium(IV), 99% TDMAT, 93-2240, contained in high-temp 50 ml Swagelok cylinder (96-1071) for CVD/ALD
  • TDMAT
  • TITANIUM TETRAKIS(DIMETHYLAMIDE)
  • TITANIUM(IV) DIMETHYLAMIDE
  • TETRAKIS(DIMETHYLAMINO)TITANIUM
  • TETRAKIS(DIMETHYLAMINO)TITANIUM(IV)
  • TETRAKIS (DIMETHYLAMIDO) TITANIUM
  • TETRAKIS(DIMETHYLAMIDO)TITANIUM(IV)
  • Methanamine, N-methyl-, titanium(4+) salt
  • n-methyl-methanamintitanium(4+)salt
  • Titanium, tetrakis(dimethylamino)-
  • Tetrakis(dimethylamino)titanium, 99.99%
  • titanium tetrakis(dimethylammonium)
  • TETRAKIS(DIMETHYLAMIDO)TITANIUM(IV), FOR
  • TETRAKIS(DIMETHYLAMINO)TITANIUM, 99.999%
  • Tetrakis(dimethylamino)titanium,99%TDMAT
  • titanium dimethylamide
  • Tetrakis(dimethylamino)titanium, 99.9% (metals basis)
  • TITANIUM TETRAKIS(DIMETHYLAMIDE), 99+%
  • Tetrakis(dimethylamino)titanium, 96% , C 44.5%, H 10.8%, Ti 26.99-29.23%
  • Titanium(IV) dimethylamide, 99.95%
  • Tetra(dimethylamino) titanium(IV)
  • Tetrakis (dimethylamido) titanium/ 99.99%
  • amino)titanium
  • Tetrakis(dimethyL
  • Tetrakis(dimethylamino)titanium(IV) TDMAT
  • TETRAKIS(DIMETHYLAMINO)TITANIUM ISO 9001：2015 REACH
  • titanium(4+) tetrakis(dimethylazanide)
  • Tetrakis(dimethylamino)titanium（TDMAT）
  • 3275-24-9
  • TiNCH324
  • CH32N4Ti
  • C8H24N4Ti
  • C2H7N14Ti
  • Ti (Titanium) Compounds
  • Classes of Metal Compounds
  • Transition Metal Compounds
  • metal amide complex
  • ALD Precursors
  • Classes of Metal Compounds
  • Ti (Titanium) Compounds
  • Transition Metal Compounds