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TETRAKIS(DIETHYLAMINO)TITANIUM

Description Reference
Product Name
TETRAKIS(DIETHYLAMINO)TITANIUM
CAS No.
4419-47-0
Chemical Name
TETRAKIS(DIETHYLAMINO)TITANIUM
Synonyms
TDEAT;amino)titanium(IV);titanium diethylamide;TITANIUM (IV) DIETHYLAMIDE;Titanium isopropoxide(TDEAT);TETRAKIS(DIETHYLAMINO)TITANIUM;Tetrakis(diethylamion)titanium;TITANIUM TETRAKIS(DIETHYLAMIDE);TETRAKIS (DIETHYLAMIDO) TITANIUM;Titanium(IV) Diethylamide 99.99%
CBNumber
CB8264181
Molecular Formula
C16H40N4Ti
Formula Weight
336.38
MOL File
4419-47-0.mol
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TETRAKIS(DIETHYLAMINO)TITANIUM Property

Melting point:
4 °C
Boiling point:
112 °C0.1 mm Hg(lit.)
Density 
0.931 g/mL at 25 °C(lit.)
refractive index 
n20/D 1.536(lit.)
Flash point:
-18 °F
storage temp. 
Store at +2°C to +8°C.
solubility 
Reacts with air.
form 
liquid
color 
yellow to orange
Specific Gravity
0.95
Hydrolytic Sensitivity
8: reacts rapidly with moisture, water, protic solvents
Sensitive 
Moisture Sensitive
BRN 
3621431
CAS DataBase Reference
4419-47-0(CAS DataBase Reference)
NIST Chemistry Reference
Tetrakis(diethylamino)titanium(4419-47-0)
EPA Substance Registry System
Ethanamine, N-ethyl-, titanium(4+) salt (4419-47-0)
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Safety

Hazard Codes 
F,C,Xi
Risk Statements 
11-14/15-34-36/37/38
Safety Statements 
26-36/37/39-43-45-37/39-16
RIDADR 
UN 3398 4.3/PG 1
WGK Germany 
3
F 
10-21
TSCA 
Yes
HS Code 
2921 19 50
HazardClass 
4.3
PackingGroup 
II
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Hazard and Precautionary Statements (GHS)

Symbol(GHS)
Signal word
Danger
Hazard statements

H225Highly Flammable liquid and vapour

H260In contact with water releases flammable gases which may ignite spontaneously

H314Causes severe skin burns and eye damage

Precautionary statements

P210Keep away from heat/sparks/open flames/hot surfaces. — No smoking.

P223Keep away from any possible contact with water, because of violent reaction and possible flash fire.

P231+P232Handle under inert gas. Protect from moisture.

P280Wear protective gloves/protective clothing/eye protection/face protection.

P370+P378In case of fire: Use … for extinction.

P422Store contents under …

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N-Bromosuccinimide Price

Sigma-Aldrich
Product number
407399
Product name
Tetrakis(diethylamido)titanium(IV)
Purity
technical grade
Packaging
5G
Price
$205
Updated
2023/06/20
Sigma-Aldrich
Product number
469866
Product name
Tetrakis(diethylamido)titanium(IV)
Purity
99.999% trace metals basis
Packaging
5g
Price
$318
Updated
2023/01/07
Sigma-Aldrich
Product number
469866
Product name
Tetrakis(diethylamido)titanium(IV)
Purity
99.999% trace metals basis
Packaging
25g
Price
$575
Updated
2023/01/07
Sigma-Aldrich
Product number
8.14018
Product name
Tetrakis(diethylamino)titanium
Purity
for synthesis
Packaging
5ml
Price
$306
Updated
2022/05/15
Alfa Aesar
Product number
040469
Product name
Tetrakis(diethylamino)titanium(IV)
Purity
99.99% (metals basis)
Packaging
50g
Price
$641
Updated
2021/12/16
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TETRAKIS(DIETHYLAMINO)TITANIUM Chemical Properties,Usage,Production

Description

Tetrakis (diethylamino) titanium is useful Ti-source precusor. Tetrakis (diethylamino) titanium is useful in TiN film deposition using the atomic layer deposition method1,2. It is also a useful compound during the process of etching a layer of diamond like carbon.

Reference

  1. Kim, Ju Youn, et al. "Comparison of TiN Films Deposited Using Tetrakisdimethylaminotitanium and Tetrakisdiethylaminotitanium by the Atomic Layer Deposition Method." Japanese Journal of Applied Physics 42.7A (2003):4245-4248.
  2. Katamreddy, Rajesh, et al. "Ti source precursors for atomic layer deposition of TiO2, STO and BST." Ecs Transactions 16.4(2008):660-71.
  3. Shoemaker, Erika Leigh, et al. "Process for reactive ion etching a layer of diamond like carbon." US, US8409458. 2013.

Chemical Properties

Clear dark red liquid

Uses

Precursors Packaged for Depositions Systems

General Description

Atomic number of base material: 22 Titanium

reaction suitability

core: titanium
reagent type: catalyst

Purification Methods

Dissolve it in *C6H6, filter if a solid separates, evaporate under reduced pressure and distil it. It is an orange liquid which reacts violently with alcohols. [Bradley et al. J Chem Soc 3857 1960, Beilstein 4 IV 313.]

TETRAKIS(DIETHYLAMINO)TITANIUM Preparation Products And Raw materials

Raw materials

Preparation Products

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TETRAKIS(DIETHYLAMINO)TITANIUM Suppliers

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4419-47-0, TETRAKIS(DIETHYLAMINO)TITANIUMRelated Search:

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  • amino)titanium(IV)
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  • 4419-47-0
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  • C2H52N4Ti
  • C8H40N4TI
  • C4H11N14Ti
  • C16H40N4Ti
  • Catalysis and Inorganic Chemistry
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