Xenon tetrafluoride Chemical Properties

Melting point:

129 °C(lit.)

Boiling point:

115.73°C (estimate)

Density 

4.32 g/mL at 25 °C(lit.)

vapor pressure 

3.8 mm Hg ( 25 °C)

solubility 

reacts with H2O

form 

colorless monoclinic crystals

color 

colorless monoclinic crystals, crystalline

Water Solubility 

reacts violently with H2O, forming Xe, O2, HF, and XeO3 [DOU83]

InChI

InChI=1S/F2Xe/c1-3-2

InChIKey

IGELFKKMDLGCJO-UHFFFAOYSA-N

SMILES

[Xe](F)F

Safety Information

Hazard Codes 

O,T+

Risk Statements 

8-25-26-34

Safety Statements 

17-26-28-36/37/39-45

RIDADR 

UN 3087 5.1/PG 2

WGK Germany 

3

RTECS 

ZE1294166

F 

1-10

HazardClass 

5.1

PackingGroup 

I

MSDS

• Language:English Provider:SigmaAldrich
• Language:English Provider:ACROS
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Xenon tetrafluoride Usage And Synthesis

Uses

xenon difluoride gas phase etching barrier layer is prepared by the following steps: (1) spraying xenon difluoride gas onto the surface of the exposed barrier layer; (2) irradiating the barrier layer on the upper surface of the dielectric layer with a light beam, so that the etching rate of the barrier layer on the upper surface of the dielectric layer is higher than that of the barrier layer on the sidewalls of the trench and the connecting hole. This invention improves the etching rate of the barrier layer on the upper surface of the dielectric layer by irradiating it with a light beam, making the etching rate of the barrier layer on the upper surface of the dielectric layer higher than that of the barrier layer on the sidewalls of the trench and the connecting hole, thus avoiding over-etching of the barrier layer on the sidewalls of the trench and the connecting hole, improving the microscopic etching uniformity, and achieving better process results.

Chemical Properties

colorless crystal(s); readily prepared by mixing fluorine and xenon; enthalpy of sublimation 60.92 kJ/mol; monoclinic, a=0.5050 nm, b=0.5922nm, c=0.5771 nm [KIR78]

Xenon tetrafluoride(13709-61-0)Related Product Information

• NITRIC OXIDE
• Hydrogen Sulfide
• XENON HEXAFLUORIDE
• Nitrogen trifluoride
• Sulfur trioxide
• Triiron tetraoxide
• Potassium superoxide
• SILVER(II) FLUORIDE
• BROMINE TRIFLUORIDE
• COBALT(III) OXIDE BLACK
• HELIUM
• NEON
• KRYPTON
• XENON
• XENON DIFLUORIDE