TRIFLUOROMETHANESULFONIC ACID TRIFLUOROMETHYL ESTER Chemical Properties

Melting point:

-108,2°C

Boiling point:

21°C

Density 

1.791±0.06 g/cm3(Predicted)

form 

liquid

color 

Clear

InChI

InChI=1S/C2F6O3S/c3-1(4,5)11-12(9,10)2(6,7)8

InChIKey

GVZFDPPAJXHNGL-UHFFFAOYSA-N

SMILES

C(F)(F)(F)S(OC(F)(F)F)(=O)=O

EPA Substance Registry System

Trifluoromethyl trifluoromethanesulfonate (3582-05-6)

Safety Information

Risk Statements 

14-34

Safety Statements 

23-38

RIDADR 

3308

HS Code 

2905190098

TRIFLUOROMETHANESULFONIC ACID TRIFLUOROMETHYL ESTER Usage And Synthesis

Chemical Properties

Colorless to pale yellow liquid

Uses

Trifluoromethyl Triflate can be used for thermal atomic layer etching processes.

Synthesis Reference(s)

The Journal of Organic Chemistry, 52, p. 4147, 1987 DOI: 10.1021/jo00228a001

TRIFLUOROMETHANESULFONIC ACID TRIFLUOROMETHYL ESTER(3582-05-6)Related Product Information

• PENTAFLUOROPHENYL TRIFLUOROACETATE
• Tetramethylammonium trifluoromethanethiolate
• Methyl trifluoroacetate
• Methyl trifluoromethanesulfonate
• Zinc trifluoromethanesulfonate
• Trifluoromethanesulfonic acid
• Sodium trifluoromethanesulfonate
• Trifluoromethanesulfonic anhydride
• Ethyl trifluoromethanesulfonate
• Sodium trifluoromethanesulfinate
• TRIFLUOROMETHANESULFONIC ACID TRIFLUOROMETHYL ESTER