ChemicalBook > CAS DataBase List > Tetramethylammonium hydroxide

Tetramethylammonium hydroxide

Product Name
Tetramethylammonium hydroxide
CAS No.
75-59-2
Chemical Name
Tetramethylammonium hydroxide
Synonyms
TMAH;TetramethyL;Developer;N,N,N-TRIMETHYLMETHANAMINIUM HYDROXIDE;TETRAMETHYLAMMONIUM HYDROXIDE SOL., 6% IN PROPYLENEGLYCOL;nmd3;nmw-w;TMNOH;ocg945;AZ-726
CBNumber
CB2854236
Molecular Formula
C4H13NO
Formula Weight
91.15
MOL File
75-59-2.mol
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Tetramethylammonium hydroxide Property

Melting point:
°C
Boiling point:
110 °C
Density 
0.866 g/mL at 25 °C
vapor pressure 
17.5 mm Hg ( 20 °C)
refractive index 
n20/D 1.384
Flash point:
80 °F
storage temp. 
Store below +30°C.
solubility 
Methanol (Sparingly), Water (Slightly)
form 
Solution
color 
APHA: ≤10
Odor
strong ammonia-like odor
PH
>13 (H2O, 20°C)
Water Solubility 
Soluble in water.
Sensitive 
Air Sensitive
Merck 
14,9224
BRN 
3558708
Stability:
Stable. Flammable. Incompatible with strong oxidizing agents, strong acids.
InChIKey
WGTYBPLFGIVFAS-UHFFFAOYSA-M
CAS DataBase Reference
75-59-2(CAS DataBase Reference)
EPA Substance Registry System
Tetramethylammonium hydroxide (75-59-2)
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Safety

Hazard Codes 
C,T,F,T+,Xn
Risk Statements 
24/25-34-20/21/22-39/23/24/25-23/24/25-10-21/22-25-21-11-67-36-52-48/24-27/28-23-35-36/38
Safety Statements 
45-36/37/39-26-16-36/37-28
RIDADR 
UN 3286 3/PG 2
WGK Germany 
1
RTECS 
PA0875000
F 
4.4-10-34
TSCA 
Yes
HazardClass 
3
PackingGroup 
II
HS Code 
29239000
Hazardous Substances Data
75-59-2(Hazardous Substances Data)
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Hazard and Precautionary Statements (GHS)

Symbol(GHS)
Signal word
Danger
Hazard statements

H226Flammable liquid and vapour

H314Causes severe skin burns and eye damage

H331Toxic if inhaled

H370Causes damage to organs

H372Causes damage to organs through prolonged or repeated exposure

H412Harmful to aquatic life with long lasting effects

Precautionary statements

P210Keep away from heat/sparks/open flames/hot surfaces. — No smoking.

P273Avoid release to the environment.

P280Wear protective gloves/protective clothing/eye protection/face protection.

P303+P361+P353IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower.

P305+P351+P338IF IN EYES: Rinse cautiously with water for several minutes. Remove contact lenses, if present and easy to do. Continuerinsing.

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N-Bromosuccinimide Price

Sigma-Aldrich
Product number
8.14748
Product name
Tetramethylammonium hydroxide
Purity
(25% solution in water) for synthesis
Packaging
250ML
Price
$57.1
Updated
2025/07/31
Sigma-Aldrich
Product number
8.14748
Product name
Tetramethylammonium hydroxide
Purity
(25% solution in water) for synthesis
Packaging
1L
Price
$154
Updated
2025/07/31
Sigma-Aldrich
Product number
8.14748
Product name
Tetramethylammonium hydroxide
Purity
(25% solution in water) for synthesis
Packaging
25kg
Price
$1150
Updated
2025/07/31
Sigma-Aldrich
Product number
328251
Product name
Tetramethylammonium hydroxide solution
Purity
10 wt. % in H2O
Packaging
250ml
Price
$73.8
Updated
2025/07/31
Sigma-Aldrich
Product number
328251
Product name
Tetramethylammonium hydroxide solution
Purity
10 wt. % in H2O
Packaging
1l
Price
$179
Updated
2025/07/31
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Tetramethylammonium hydroxide Chemical Properties,Usage,Production

Description

Tetramethylammonium hydroxide is a solid in the hydrated form or a colorless liquid with a strong ammonia-like odor. It is soluble in water, and corrosive to metals and tissue.

Chemical Properties

colourless to yellow liquid

Uses

▼
▲
Industry
Application
Role/benefit
Organic silicon
Production of dimethyl silicone oil, organic silicon resin, silicon rubber, etc.
Catalyst/removed easily; no pollution to the products
Chemical analysis
Polarography experiment
Polarographic reagent
Thermochemolysis to study fungal degradation of wood
Analytical reagent
Chemical purification
Removal of metal elements
Ash free alkali/source of base; make the metal elements precipitated
Electron
Production of computer silicon chip
Brightening agent; anisotropic etching agent; cleaning agent; photoresist developer
Printing of circuit board
Cleaning agent
Semiconductor manufacturing
Chemical stripper
Others
Synthesis of ferrofluid
Surfactant/ inhibit nanoparticle aggregation
Synthesis of zeolite
Structure directing agent

Uses

Tetramethylammonium hydroxide is used to produce tetramethyl-ammonium azide. It is used as an anisotropic etchant of silicon, basic solvent in the development of acidic photoresist in photolithography process, as surfactant in the synthesis of ferrofluid and as a polarographic reagent. It finds application in the production of organic silicon, where it is used for computer silicon wafer surface brightener and cleaning agent. It is also involved in the purification of some metallic elements.
Tetramethylammonium hydroxide solution (25 wt.% solution in water) may be used as a base for pH adjustment to obtain hexagonal mesoporous aluminophosphate (TAP).

General Description

Tetramethylammonium hydroxide is a quaternary ammonium salt generally used as an anisotropic etchant for silicon due to its high silicon etching rate.

Reactivity Profile

Tetramethylammonium hydroxide acts like a base. Bases are chemically similar to sodium hydroxide (NaOH) or sodium oxide (Na2O). They neutralize acids exothermically to form salts plus water. When soluble in water they give solutions having a pH greater than 7.0. Mixing these materials with water can generate troublesome amounts of heat as the base is dissolved or diluted. Bases react with certain metals (such as aluminum and zinc) to form oxides or hydroxides of the metal and generate gaseous hydrogen. Bases may initiate polymerization reactions in polymerizable organic compounds, especially epoxides). They may generate flammable and/or toxic gases with ammonium salts, nitrides, halogenated organics, various metals, peroxides, and hydroperoxides. Materials of this group often serve as catalysts.

Health Hazard

TOXIC; inhalation, ingestion or skin contact with material may cause severe injury or death. Contact with molten substance may cause severe burns to skin and eyes. Avoid any skin contact. Effects of contact or inhalation may be delayed. Fire may produce irritating, corrosive and/or toxic gases. Runoff from fire control or dilution water may be corrosive and/or toxic and cause pollution.

Fire Hazard

Combustible material: may burn but does not ignite readily. When heated, vapors may form explosive mixtures with air: indoors, outdoors and sewers explosion hazards. Contact with metals may evolve flammable hydrogen gas. Containers may explode when heated. Runoff may pollute waterways. Substance may be transported in a molten form.

reaction suitability

reaction type: Acid-base reactions
reaction type: Redox Reactions

Safety Profile

Poison by subcutaneous route. A powerful caustic. A corrosive irritant to skin, eyes, and mucous membranes. When heated to decomposition it emits toxic fumes of NOx and NH3.

Purification Methods

It is freed from chloride ions by passage through an ion-exchange column (e.g. Amberlite IRA-400, prepared in its OH-form by passing 2M NaOH until the effluent is free from chloride ions, then washed with distilled H2O until neutral). A modification, to obtain carbonate-free hydroxide, uses the method of Davies and Nancollas [Nature 165 237 1950]. [Beilstein 4 IV 145.]

References

1.https://en.wikipedia.org/wiki/Tetramethylammonium_hydroxide#Uses
2.http://sacheminc.com/other-chemicals/tetramethylammonium-hydroxide-tmah/
3.https://www.fs.usda.gov/treesearch/pubs/15506
4.https://www.concordia.ca/content/dam/concordia/services/safety/docs/EHS-DOC-020_TMAHGuidelines.pdf
5.https://www.chemicalbook.com/ChemicalProductProperty_EN_CB2854236.htm

Tetramethylammonium hydroxide Preparation Products And Raw materials

Raw materials

Preparation Products

Dimethicone Poly(dimethylsiloxane) Silicone rubber,methyl RTV 107
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View Lastest Price from Tetramethylammonium hydroxide manufacturers

Jinan Finer Chemical Co., Ltd
Product
Tetramethylammonium hydroxide 75-59-2
Price
US $5.00/KG
Min. Order
1KG
Purity
25%
Supply Ability
1000mt/year
Release date
2023-02-06
Hebei Chuanghai Biotechnology Co., Ltd
Product
Tetramethylammonium hydroxide 75-59-2
Price
US $10.00/KG
Min. Order
1KG
Purity
99%
Supply Ability
10 mt
Release date
2025-03-14
Hebei Yanxi Chemical Co., Ltd.
Product
Tetramethylammonium hydroxide 75-59-2
Price
US $0.00/kg
Min. Order
1kg
Purity
0.99
Supply Ability
20tons
Release date
2023-09-13

75-59-2, Tetramethylammonium hydroxideRelated Search:

Tetrapropylammonium hydroxide Aluminum hydroxide Ammonium sulfate 2,2,6,6-Tetramethylpiperidinooxy Molybdic acid Tetramethylammonium hydroxide pentahydrate Tetrabutylammonium hydroxide Benzyltrimethylammonium hydroxide Sodium hydroxide Ammonium acetate Ammonium chloride Tetraethylammonium hydroxide Tetramethylammonium bromide Reinecke salt TETRAMETHYLAMMONIUM HEXAFLUOROPHOSPHATE Tetramethylammonium sulfate Ammonium hydroxide Tri-(4-hydroxy-TEMPO) phosphite

  • N,N,N-TRIMETHYLMETHANAMINIUM HYDROXIDE
  • TETRAMETHYLAMMONIUM HYDROXIDE
  • TMAH
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  • TETRAMETHYLAMMONIUM HYDROXIDEOL
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  • Tetramethylammonium hydroxide, 25% in water
  • TETRAMETHYLAMMONIUM HYDROXIDE, SOLUTION 1.0 Mol/L in WATER, REAGENT (ACS)
  • TETRAMETHYLAMMONIUM HYDROXIDE, SOLUTION 25% in METHANOL
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  • TRITONNE
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  • TETRAMETHYLAMMONIUM HYDROXIDE: 25% AQUEOUS SOLUTION
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  • Tetramethylammonium hydroxide, 25 wt. % in water
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  • 25% AQUEOUS SOLUTION
  • Tetramethylammonium hydroxide, 25% w/w aq. soln.
  • Developer
  • TetraMethylaMMoniuM Hydroxide Solution, 25 wt. % in H2O
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  • TetramethyL
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  • megapositcd14
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  • TETRAMETHYLAMMONIUM HYDROXIDE, 10 WT. % SOLUTION IN WATER
  • TETRAMETHYLAMMONIUM HYDROXIDE SOL., 6% IN PROPYLENEGLYCOL
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  • TETRAMETHYLAMMONIUM HYDROXIDE CONC., FOR IPC, PGE W. 6 VIALS
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