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TANTALUM SILICIDE

Product Name
TANTALUM SILICIDE
CAS No.
12067-56-0
Chemical Name
TANTALUM SILICIDE
Synonyms
silicon,tantalum;Einecs 235-081-3;TANTALUM SILICIDE;pentatantalum trisilicide;Nickel Chromium (Ni-Cr) Alloy Sputtering Targets;Tantalumsilicide,99.5%(metalsbasisexcludingNb),Nb0.1-1%;TANTALUM SILICIDE, 99.5% (METALS BASIS EXCLUDING NB), NB 0.1
CBNumber
CB4174798
Molecular Formula
H4SiTa
Formula Weight
213.06
MOL File
12067-56-0.mol
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TANTALUM SILICIDE Property

Melting point:
2499 ℃
Density 
13,060 (ρ/kg.m–3)
Crystal Structure
Hexagonal
Stability:
The compound is thermally stable in air up to 400°C
EPA Substance Registry System
Tantalum silicide (Ta5Si3) (12067-56-0)
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Safety

TSCA 
Yes
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Hazard and Precautionary Statements (GHS)

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TANTALUM SILICIDE Chemical Properties,Usage,Production

Chemical Properties

-325 mesh powder(s); used as a 99.5 or 99.95% material as a sputtering target in the fabrication of integrated circuits [ALF93] [CER91]

TANTALUM SILICIDE Preparation Products And Raw materials

Raw materials

Preparation Products

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