Basic information Safety Supplier Related

TETRAKIS(ETHYLMETHYLAMINO)TITANIUM

Basic information Safety Supplier Related

TETRAKIS(ETHYLMETHYLAMINO)TITANIUM Basic information

Product Name:
TETRAKIS(ETHYLMETHYLAMINO)TITANIUM
Synonyms:
  • TITANIUM TETRAKIS(ETHYLMETHYLAMIDE), 99+%
  • Tetrakis(ethylMethylaMido)titaniuM(IV) electronic grade, >=99.99%
  • TITANIUM TETRAKIS(ETHYLMETHYLAMIDE)
  • TETRAKIS(ETHYLMETHYLAMINO)TITANIUM
  • tetrakis(ethylmethylamido)titanium(iv)
  • tetrakis(ethylmethylamino)titanium(iv)
  • TETRAKIS(ETHYLMETHYLAMINO)TITANIUM, 99.9
  • TETRAKIS(ETHYLMETHYLAMINO)TITANIUM,99%(99.99%-TI)PURATREM
CAS:
308103-54-0
MF:
C12H32N4Ti
MW:
280.28
Mol File:
308103-54-0.mol
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TETRAKIS(ETHYLMETHYLAMINO)TITANIUM Chemical Properties

Boiling point:
80 °C/0.1 mmHg (lit.)
Density 
0.923 g/mL at 25 °C (lit.)
Flash point:
36 °F
storage temp. 
2-8°C
form 
liquid
Specific Gravity
0.923
color 
yellow to orange
Hydrolytic Sensitivity
8: reacts rapidly with moisture, water, protic solvents
Sensitive 
moisture sensitive
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Safety Information

Hazard Codes 
F,C
Risk Statements 
11-14-34
Safety Statements 
16-26-36/37/39-43-45
RIDADR 
UN 3398 4.3/PG 1
WGK Germany 
3
TSCA 
No

MSDS

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TETRAKIS(ETHYLMETHYLAMINO)TITANIUM Usage And Synthesis

Uses

Precursor to titanium nitride (TiN) thin films by organometallic chemical vapor deposition (OMCVD).

General Description

Atomic number of base material: 22 Titanium

TETRAKIS(ETHYLMETHYLAMINO)TITANIUMSupplier

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