TETRAKIS(DIETHYLAMINO)TITANIUM Chemical Properties

Melting point:

4 °C

Boiling point:

112 °C0.1 mm Hg(lit.)

Density 

0.931 g/mL at 25 °C(lit.)

refractive index 

n20/D 1.536(lit.)

Flash point:

-18 °F

storage temp. 

Store at +2°C to +8°C.

solubility 

Reacts with air.

form 

liquid

color 

yellow to orange

Specific Gravity

0.95

Hydrolytic Sensitivity

8: reacts rapidly with moisture, water, protic solvents

Sensitive 

Moisture Sensitive

BRN 

3621431

CAS DataBase Reference

4419-47-0(CAS DataBase Reference)

NIST Chemistry Reference

Tetrakis(diethylamino)titanium(4419-47-0)

EPA Substance Registry System

Ethanamine, N-ethyl-, titanium(4+) salt (4419-47-0)

Safety Information

Hazard Codes 

F,C,Xi

Risk Statements 

11-14/15-34-36/37/38

Safety Statements 

26-36/37/39-43-45-37/39-16

RIDADR 

UN 3398 4.3/PG 1

WGK Germany 

3

F 

10-21

TSCA 

Yes

HS Code 

2921 19 50

HazardClass 

4.3

PackingGroup 

II

MSDS

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TETRAKIS(DIETHYLAMINO)TITANIUM Usage And Synthesis

Description

Tetrakis (diethylamino) titanium is useful Ti-source precusor. Tetrakis (diethylamino) titanium is useful in TiN film deposition using the atomic layer deposition method^1,2. It is also a useful compound during the process of etching a layer of diamond like carbon.

Reference

1. Kim, Ju Youn, et al. "Comparison of TiN Films Deposited Using Tetrakisdimethylaminotitanium and Tetrakisdiethylaminotitanium by the Atomic Layer Deposition Method." Japanese Journal of Applied Physics 42.7A (2003):4245-4248.
2. Katamreddy, Rajesh, et al. "Ti source precursors for atomic layer deposition of TiO2, STO and BST." Ecs Transactions 16.4(2008):660-71.
3. Shoemaker, Erika Leigh, et al. "Process for reactive ion etching a layer of diamond like carbon." US, US8409458. 2013.

Chemical Properties

Clear dark red liquid

Uses

Precursors Packaged for Depositions Systems

General Description

Atomic number of base material: 22 Titanium

Purification Methods

Dissolve it in *C6H6, filter if a solid separates, evaporate under reduced pressure and distil it. It is an orange liquid which reacts violently with alcohols. [Bradley et al. J Chem Soc 3857 1960, Beilstein 4 IV 313.]

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