TETRAKIS(DIMETHYLAMINO)ZIRCONIUM Chemical Properties

Melting point:

57-60 °C(lit.)

Boiling point:

80°C 0,1mm

Flash point:

>65℃

storage temp. 

2-8°C

form 

solid

Sensitive 

moisture sensitive, store cold

Hydrolytic Sensitivity

8: reacts rapidly with moisture, water, protic solvents

Safety Information

Hazard Codes 

F,Xi

Risk Statements 

11-14/15-36/37/38

Safety Statements 

16-26-36-43

RIDADR 

UN 3396 4.3/PG 2

WGK Germany 

3

TSCA 

No

HS Code 

29310099

MSDS

• Language:English Provider:SigmaAldrich
• Language:English Provider:ACROS

TETRAKIS(DIMETHYLAMINO)ZIRCONIUM Usage And Synthesis

Chemical Properties

Pale yellow-greenish crystalline solid

Uses

Precursors Packaged for Depositions Systems

Uses

Tetrakis(dimethylamido) zirconium (IV) may be used as a precursor for atomic layer deposition of zirconium which find applications ranging from gas sensors to high-k dielectrics in microelectronics.

General Description

Atomic number of base material: 40 Zirconium

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