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TETRAKIS(DIMETHYLAMIDO)HAFNIUM(IV)

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TETRAKIS(DIMETHYLAMIDO)HAFNIUM(IV) Basic information

Product Name:
TETRAKIS(DIMETHYLAMIDO)HAFNIUM(IV)
Synonyms:
  • (19962-11-9) hafnium tetradimethylamide
  • Tetrakis(dimethylamido)hafnium(IV),TDMAH, Tetrakis(dimethylamino)hafnium(IV)
  • TDMAH
  • Tetrakis(dimethylamino)hafnium(IV) 99.999%
  • Dimethylamine hafnium(4+) salt
  • Hafnium tetradimethylamide
  • Hafnium(4+) dimethylamide
  • Tetrakis(dimethylamino)hafnium, 98+% (99.99+%-Hf, <0.2%-Zr) TDMAH, PURATREM, 72-8000, contained in 50 ml Swagelok(R) cylinder (96-1070) for CVD/ALD
CAS:
19782-68-4
MF:
C8H24HfN4
MW:
354.79
Product Categories:
  • ALD Precursors
Mol File:
19782-68-4.mol
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TETRAKIS(DIMETHYLAMIDO)HAFNIUM(IV) Chemical Properties

Melting point:
26-29 °C(lit.)
Boiling point:
85°C/0.1mm
Density 
1.098 g/mL at 25 °C
Flash point:
109 °F
form 
crystal
color 
colorless to pale yellow
Specific Gravity
1.40
Hydrolytic Sensitivity
8: reacts rapidly with moisture, water, protic solvents
Sensitive 
moisture sensitive, store cold
InChIKey
ZYLGGWPMIDHSEZ-UHFFFAOYSA-N
CAS DataBase Reference
19782-68-4
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Safety Information

Hazard Codes 
F,C
Risk Statements 
11-14-34
Safety Statements 
6-26-36/37/39-43-45
RIDADR 
UN 3396 4.3/PG 2
WGK Germany 
3
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TETRAKIS(DIMETHYLAMIDO)HAFNIUM(IV) Usage And Synthesis

Uses

Used as precursor for atomic layer deposition of Hafnium Oxide nanolaminates, which are used as a reploacement for Silicon oxide in semiconductor devices.

General Description

Please inquire for bulk quantity, pricing, and packaging options.

TETRAKIS(DIMETHYLAMIDO)HAFNIUM(IV)Supplier

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