ChemicalBook > CAS DataBase List > Hexamethyldisilazane

Hexamethyldisilazane

Product Name
Hexamethyldisilazane
CAS No.
999-97-3
Chemical Name
Hexamethyldisilazane
Synonyms
HMDS;BIS(TRIMETHYLSILYL)AMINE;1,1,1,3,3,3-HEXAMETHYLDISILAZANE;HEXAMETHYLDISILYLAMINE;HMDZ;hexamethylsilazane;((CH3)3Si)2NH;hexamethyldisilazane(hmds);1,1,1,3,3,3-Hexamithyl disilazane;1,1,1-Trimethyl-N-(trimethylsilyl)silanamine
CBNumber
CB9105784
Molecular Formula
C6H19NSi2
Formula Weight
161.39
MOL File
999-97-3.mol
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Hexamethyldisilazane Property

Melting point:
-78 °C
Boiling point:
125 °C (lit.)
Density 
0.774 g/mL at 25 °C(lit.)
vapor density 
4.6 (vs air)
vapor pressure 
20 hPa (20 °C)
refractive index 
n20/D 1.407(lit.)
Flash point:
57.2 °F
storage temp. 
Store below +30°C.
solubility 
Miscible with acetone, benzene, ethyl ether, heptane and perchloroethylene.
pka
30(at 25℃)
form 
Liquid
color 
Colorless
Specific Gravity
0.774
Odor
Ammonia odour
PH Range
8.5
explosive limit
0.8-25.9%(V)
Water Solubility 
REACTS
Sensitive 
Moisture Sensitive
Hydrolytic Sensitivity
7: reacts slowly with moisture/water
Merck 
14,4689
BRN 
635752
InChIKey
FFUAGWLWBBFQJT-UHFFFAOYSA-N
LogP
0.23-1.19 at 20-25℃
CAS DataBase Reference
999-97-3(CAS DataBase Reference)
NIST Chemistry Reference
Silanamine, 1,1,1-trimethyl-N-(trimethylsilyl)-(999-97-3)
EPA Substance Registry System
Hexamethyldisilazane (999-97-3)
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Safety

Hazard Codes 
F,C,Xn
Risk Statements 
11-20/21/22-34-52/53
Safety Statements 
16-26-36/37/39-45-61
RIDADR 
UN 3286 3/PG 2
WGK Germany 
2
RTECS 
JM9230000
F 
21
Autoignition Temperature
325 °C
Hazard Note 
Flammable
TSCA 
Yes
HS Code 
2931 90 00
HazardClass 
3
PackingGroup 
II
Hazardous Substances Data
999-97-3(Hazardous Substances Data)
Toxicity
LDLO i.p. in mice: 650 mg/kg (Petrarch Systems Inc. Product Information Sheets)
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Hazard and Precautionary Statements (GHS)

Symbol(GHS)
Signal word
Danger
Hazard statements

H225Highly Flammable liquid and vapour

H311Toxic in contact with skin

H412Harmful to aquatic life with long lasting effects

Precautionary statements

P210Keep away from heat/sparks/open flames/hot surfaces. — No smoking.

P273Avoid release to the environment.

P280Wear protective gloves/protective clothing/eye protection/face protection.

P301+P312IF SWALLOWED: call a POISON CENTER or doctor/physician IF you feel unwell.

P303+P361+P353IF ON SKIN (or hair): Remove/Take off Immediately all contaminated clothing. Rinse SKIN with water/shower.

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N-Bromosuccinimide Price

Sigma-Aldrich
Product number
86944
Product name
Hexamethyldisilazane
Purity
produced by Wacker Chemie AG, Burghausen, Germany, ≥97.0% (GC)
Packaging
500G
Price
$150
Updated
2024/03/01
Sigma-Aldrich
Product number
86944
Product name
Hexamethyldisilazane
Purity
produced by Wacker Chemie AG, Burghausen, Germany, ≥97.0% (GC)
Packaging
5KG
Price
$732
Updated
2024/03/01
Sigma-Aldrich
Product number
86944
Product name
Hexamethyldisilazane
Purity
produced by Wacker Chemie AG, Burghausen, Germany, ≥97.0% (GC)
Packaging
20KG
Price
$2540
Updated
2024/03/01
Sigma-Aldrich
Product number
8.04324
Product name
1,1,1,3,3,3-Hexamethyldisilazane
Purity
for synthesis
Packaging
50mL
Price
$39.6
Updated
2024/03/01
Sigma-Aldrich
Product number
8.04324
Product name
1,1,1,3,3,3-Hexamethyldisilazane
Purity
for synthesis
Packaging
250ML
Price
$111
Updated
2024/03/01
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Hexamethyldisilazane Chemical Properties,Usage,Production

Description

Hexamethyldisilazane is a bulk organo silicon compound, being a quite useful silanizing agent. It is a reagent for the preparation of trimethylsilyl derivatives. It can also be used to dehydrate cells of biomaterials for scanning electron microscopy (SEM). Moreover, it is an adhesion promoter for photoresist in photolithography, and is also useful in the pyrolysis-gas chromatography-mass spectrometry to enhance the detectability of compounds with polar functional groups.

Chemical Properties

Hexamethyldisilazane, also known as HMDS, is an important organosilicon compound, a colorless and transparent liquid. It is readily hydrolyzed and gives off NH3 to produce hexamethyldisilyl ether. In the presence of a catalyst, it reacts with alcohols or phenols to produce trimethylalkoxysilane or trimethylaroxysilane. Reacts with anhydrous hydrogen chloride, releasing NH3 or NH4Cl, to produce trimethylchlorosilane.

Physical properties

Colorless transparent and easy flowing liquid. Boiling point 125℃, relative density 0.76 (20/4℃). Soluble in organic solvents, it will be rapidly hydrolyzed in contact with air to form trimethylsilanol and hexamethyldisilyl ether.

Uses

Hexamethyldisilazane mainly used as methyl silane alkylation (such as amikacin, penicillin, cephalosporins and kinds of penicillin derivatives), hydroxyl protectants of antibiotics. It is used as surface treatment agent of diatomite, white carbon black, titanium and blond additives of photoresist in the semiconductor industry. It is used as treatment agent of tearing strength resistance. It is used as a solvent in organic synthesis and organometallic chemistry. It is used as an adhesion promoter for photoresist in photolithography. it is used for the preparation of trimethylsilyl ethers from hydroxy compounds. It is used as an alternative to critical point drying during sample preparation in electron microscopy. It is added to analyte to get silylated diagnostic products during pyrolysis in gas chromatography- mass spectrometry.

Definition

ChEBI: Hexamethyldisilazane is an N-silyl compound obtained from ammonia by replacement of two of the hydrogens with trimethylsilyl groups. Hexamethyldisilazane is a derivatisation agent used in gas chromatography mass spectrometry applications. It has a role as a chromatographic reagent. It derives from a hydride of an ammonia.

Reactions

Hexamethyldisilazane(HMDS) is an extremely versatile and strong silylating agent. It is primarily used for the protection of sensitive functional groups during chemical synthesis.One of the advantages of Hexamethyldisilazane over chlorosilanes is that no base is needed as a hydrochloric acid acceptor. It produces ammonia which escapes easily from the reaction mixture during silylation.

General Description

Hexamethyldisilazane appears as a liquid. May be toxic by ingestion. Irritates skin and eyes. Vapors are heavier than air. May emit highly toxic nitrogen oxide fumes when heated to decomposition. Used to deactivate chromatography support materials and to promote adhesion of photoresists in the electronics industry.

Air & Water Reactions

Highly flammable. Moisture sensitive.

Reactivity Profile

Hexamethyldisilazane reacts with many carbonyl containing organic compounds to generate gaseous ammonia. May be incompatible with isocyanates, halogenated organics, peroxides, phenols (acidic), epoxides, anhydrides, and acid halides. Flammable gaseous hydrogen may be generated in combination with strong reducing agents, such as hydrides.

Hazard

Flammable, moderate fire risk.

Health Hazard

Inhalation or contact with material may irritate or burn skin and eyes. Fire may produce irritating, corrosive and/or toxic gases. Vapors may cause dizziness or suffocation. Runoff from fire control or dilution water may cause pollution.

Synthesis

A production method for hexamethyldisilazane comprises the following steps: trimethylsilyl chloride is added into a sealed reaction kettle with a bearing pressure higher than 0.5MPa, stirring is carried out, ammonia gas is introduced, the ammonia pressure in the reaction kettle is maintained at a value between 0.1MPa and 0.2MPa, the temperature is between 40 ℃ and 50 ℃, the reaction is carried out, and the ammonia gas quantity is gradually reduced till the stop; and then, the pressure is maintained at the unchanged value between 0.1MPa and 0.2MPa, the reaction is maintained for 0.5h to 2h, then, the temperature in the kettle is lowered to a value below 10 ℃, water with the temperature lower than 10 ℃ is added, the dissolution reaction is carried out to generate ammonia chloride, and upper layer materials are hexamethyldisilazane after the delamination.

Purification Methods

A possible impurity is Me3SiCl. Wash it well with pet ether and fractionate it through a vacuum jacketed column packed with Helipac using a reflux ratio of 10:1. [Langer et al. J Org Chem 23 50 1958, Beilstein 4 IV 4014.]

References

Deng, Xiang. "Hexamethyldisilazane." Synlett 2011.06(2011):881-882. Chiavari, G, D. Fabbri, and S. Prati. "Gas chromatographic-mass spectrometric analysis of products arising from pyrolysis of amino acids in the presence of hexamethyldisilazane." Journal of Chromatography A922.1–2(2001):235-241.
Nation, J. L. "A new method using hexamethyldisilazane for preparation of soft insect tissues for scanning electron microscopy." Stain Technology 58.6(1983):347-51.
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Hexamethyldisilazane Preparation Products And Raw materials

Raw materials

4-Chlorobenzaldehyde Chlorotrimethylsilane Diethyl ether Ammonium chloride

Preparation Products

O,O'-BIS(TRIMETHYLSILYL)-5-FLUOROURACIL beta-Methyl vinyl phosphate (MAP) 6-BROMO-1H-PYRROLO[2,3-B]PYRIDINE Lithium bis(trimethylsilyl)amide Tegafur (2R)-2-[(4-Ethyl-2,3-dioxopiperazinyl)carbonylamino]-2-phenylacetic acid 3-METHOXYBENZAMIDINE HYDROCHLORIDE (2R)-2-[(4-Ethyl-2,3-dioxopiperazinyl)carbonylamino]-2-(4-hydroxyphenyl)acetic acid 6-CHLORO-1H-PYRROLO[2,3-B]PYRIDINE Sodium bis(trimethylsilyl)amide
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View Lastest Price from Hexamethyldisilazane manufacturers

Jinan Finer Chemical Co., Ltd
Product
Hexamethyldisilazane 999-97-3
Price
US $0.00/Kg/Drum
Min. Order
1KG
Purity
99%
Supply Ability
2000mt/year
Release date
2021-08-03
Ningxia Jinhua Chemical Co.,Ltd
Product
Hexamethyldisilazane(HMDS) 999-97-3
Price
US $0.00/Kg/Drum
Min. Order
25Kg/Drum
Purity
99%
Supply Ability
200 tons
Release date
2020-08-07
Baoji Guokang Bio-Technology Co., Ltd.
Product
Hexamethyldisilazane 999-97-3
Price
US $20.00/KG
Min. Order
1T
Purity
99%
Supply Ability
1000T
Release date
2021-06-03

999-97-3, HexamethyldisilazaneRelated Search:

llthium(hexamethyldisilazane),LITHIUM HEXAMETHYLDISILAZANE,HEXAMETHYLDISILAZANE LITHIUM SALT,1,1,1,3,3,3-HEXAMETHYLDISILAZANE LITHIUM SALT N-Methyl-2-pyrrolidone Heptamethyldisilazane Hexamethyldisilane Hexamethyldisiloxane Trimethyl borate Sodium bis(trimethylsilyl)amide 1,3-Bis(trimethylsilyl)urea N-(Trimethylsilyl)acetamide Heptamethyldisilazane POLY(METHYLSILSESQUIOXANE) 2,2,4,4,6,6-Hexamethylcyclotrisilazane Octamethylcyclotetrasilazane Potassium bis(trimethylsilyl)amide 3-Glycidoxypropyltrimethoxysilane 3-Aminopropyltriethoxysilane Hexamethylcyclotrisiloxane 1,3,5-triazine-2,4,6-triyltrinitrilohexamethanol

  • ((CH3)3Si)2NH
  • 1,1,1,3,3,3-hexamethyl-disilazan
  • 1,1,1-trimethyl-n-(trimethylsilyl)-silanamin
  • BIS(TRIMETHYLSILYL)AMINE
  • HMDS
  • hexamethyl disilizane
  • HEXAMETHYLDISILYLAMINE
  • HEXAMETHYLDISILAZANE
  • Disilazane, 1,1,1,3,3,3-hexamethyl-
  • LABOTEST-BB LT01408762
  • 1,1,1,3,3,3-HEXAMETHYLDISILAZANE
  • 1,1,1-Trimethyl-N-(trimethylsilyl)silanamine
  • SILAZANE HMN
  • 1,1,1,3,3,3-Hexamethyldisilazane(HMDS)
  • HEXAMETHYLDISILAZANE SEMICONDUCTOR GRADE
  • Hexamethyldisilazane, ReagentPlus(R), 99.9%
  • HEXAMETHYLDISILAZANE, WACKER QUALITY
  • HMDS, 30ML
  • HEXAMETHYLDISILAZANE, >=99%
  • 1,1,1,3,3,3-Hexamithyl disilazane
  • (dimethyl-trimethylsilylamino-silyl)methane
  • 1,1,1,3,3,3-HEXAMETHYLDISILAZANE ELECTRONIC GRADE 99+%
  • 1,1,1,3,3,3-Hexamethylpropanedisilazane
  • 2,2,4,4-Tetramethyl-3-aza-2,4-disilapentane
  • Di(trimethylsilyl)amine
  • 1,1,1,3,3,3-Hexamethyldisilazane, 98+%
  • Hexamethyldisilazane,electronicgrade,99+%
  • Silanamine, trimethyl-N-trimethylsilyl-
  • 1,1,1,3,3,3-HexaMethyldisilazane, 98%, AcroSeal
  • 1,1,1,3,3,3-HexaMethyldisilazane, 98% 100ML
  • 1,1,1,3,3,3-HexaMethyldisilazane, 98% 10ML
  • Hexamethyldisilazane,HMDS, Silazane HMN
  • Hexamethyldisilazane,1,1,1,3,3,3-Hexamethyldisilazane, HMDS
  • Hexamethyldisilazane,Dow Corning product Z-6079, HMDS
  • 1,1,1,3,3,3-Hexamethyldisilazane, AcroSeal, 98%
  • Bis(trimethylsilyl)amine, HMDS
  • 1,1,1,3,3,3HEXAMETHYLDISILAZANE FOR GAS
  • 1,1,1,3,3,3-HEXAMETHYLDISILAZANE FOR SYN
  • hexamethyldisilazane(hmds)
  • hexamethylsilazane
  • sz6079
  • Trimethyl-N-(trimethylsilyl)silanamine
  • tsl8802
  • Co-Formula CFS-973
  • 1,1,1,3,3,3HXAMETHLDISLAZAN
  • HMDS 999-97-3 1 kg
  • HMDS >=99%
  • MM capping agent
  • 1,1,1,3,3,3-HexaMethyldisilazane (Related Reference)
  • DYNASYLAN HMDS
  • (diMethylsilyl)(Methyl)(triMethylsilyl)aMine
  • HexaMethyl disilylaMine (HMDS)
  • HMDS)HexaMethyl disilyla
  • 1,1,1,3,3,3-hexaMethy
  • HexaMethyldisilazane reagent grade, >=99%
  • HexaMethyldisilazane aMine dioxane (HMDS)
  • HexaMethyldisilazane, 99.9%
  • HexaMethyldisilazane, J&KSeal